@misc{1145741,
  author = {David S Yaney and Alice D Settle-Raskin},
  title = {National Semiconductor Metrology Program::project portfolio, FY 1996},
  year = {1996},
  month = {1996-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.IR.5851},
  language = {en},
}