@article{1238691,
  author = {Aaron Katzenmeyer and Michael Titze and Sam Frisone and Tony Ohlhausen and Anthony Flores and Deanna Campbell and Bingjun Li and Yongqiang Wang and Jung Han and Edward Bielejec and Rachel Goldman},
  title = {Comparison of Mg-based liquid metal ion sources for scalable focused-ion-implantation doping of GaN},
  year = {2024},
  number = {14},
  month = {2024-04-18 04:04:00},
  publisher = {AIP Advances},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=957347},
  doi = {https://doi.org/10.1063/5.0198791 },
  language = {en},
}