@conference{2546, author = {Vladimir Aksyuk and Brian Dennis and Michael Haftel and David Czaplewski and Daniel Lopez and Girsh Blumberg}, title = {Small footprint nano-mechanical plasmonic phase modulators}, year = {2015}, month = {2015-06-21}, publisher = {18th International Conference on Solid-State Sensors, Actuators and Microsystems, Anchorage, AK}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=918271}, language = {en}, }