@article{817376, author = {Houxun Miao and Andrew Gomella and Nicholas Chedid and Lei Chen and Han Wen}, title = {Fabrication of 200 nm Period Hard X-Ray Phase Gratings}, year = {2014}, number = {14}, month = {2014-06-11 00:06:00}, publisher = {Nano Letters}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=915830}, doi = {https://doi.org/10.1021/nl5009713}, language = {en}, }