TY  - GEN
AU  - David S Yaney
AU  - Alice D Settle-Raskin
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1996-01-01 05:01:00
DO  - https://doi.org/10.6028/NIST.IR.5851
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1996
TI  - National Semiconductor Metrology Program::project portfolio, FY 1996
ER  -