TY  - JOUR
AU  - Adam McCaughan
AU  - Alexander Tait
AU  - Sonia Buckley
AU  - Jeff Chiles
AU  - Jeff Shainline
AU  - Sae Woo Nam
AU  - Dylan Oh
C2  - Journal of Vacuum Science and Technology B
DA  - 2021-09-27 04:09:00
DO  -  https://doi.org/10.1116/6.0001203
LA  - en
PB  - Journal of Vacuum Science and Technology B
PY  - 2021
TI  - PHIDL: Python-based layout and geometry creation for nanolithography
ER  -