TY  - JOUR
AU  - Tarrio, Charles
AU  - Berg, Robert
AU  - Lucatorto, Thomas
AU  - Lairson, Bruce
AU  - Lopez, Heidi
AU  - Ayers, Travis
C2  - Review of Scientific Instruments
DA  - 2015-11-12
LA  - en
M1  - 86
PB  - Review of Scientific Instruments
PY  - 2015
TI  - Thermally stable thin-film filters for high-power extreme-ultraviolet applications
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=919314
ER  -