TY  - JOUR
AU  - Mark, 
AU  - Silver, Richard
AU  - Villarrubia, John
AU  - Zhang, Nien
AU  - Zhou, Hui
AU  - Barnes, Bryan
AU  - Vladar, Andras
AU  - Ming, Bin
C2  - Journal of Micro/Nanolithography, MEMS, and MOEMS
DA  - 2015-11-12
DO  - https://doi.org/10.1117/1.JMM.14.4.044001
LA  - en
M1  - 14
PB  - Journal of Micro/Nanolithography, MEMS, and MOEMS
PY  - 2015
TI  - Optimizing Hybrid Metrology: Rigorous Implementation of Bayesian and Combined Regression.
ER  -