TY - JOUR AU - Shainline, Jeffrey AU - Buckley, Sonia AU - Nader, Nima AU - Gentry, Cale AU - Cossel, Kevin AU - Popovic, Milos AU - Newbury, Nathan AU - Mirin, Richard C2 - Applied Physics Letters DA - 2017-05-01 DO - https://doi.org/10.1364/OE.25.010322 LA - en M1 - 25 PB - Applied Physics Letters PY - 2017 TI - Room-temperature-deposited dielectrics and superconductors for integrated photonics ER -