TY - JOUR AU - Vlajic, Nicholas AU - Davis, Melissa AU - Stambaugh, Corey C2 - Journal of Dynamic Systems Measurement and Control-Transactions of the ASME DA - 2018-07-02 DO - https://doi.org/10.1115/1.4040504 LA - en PB - Journal of Dynamic Systems Measurement and Control-Transactions of the ASME PY - 2018 TI - Nanometer Positional Control using Magnetic Suspension for Vacuum-to-Air Mass Metrology ER -