TY - CONF AU - Vladimir Aksyuk AU - Brian Dennis AU - Michael Haftel AU - David Czaplewski AU - Daniel Lopez AU - Girsh Blumberg C2 - 18th International Conference on Solid-State Sensors, Actuators and Microsystems, Anchorage, AK DA - 2015-06-21 LA - en PB - 18th International Conference on Solid-State Sensors, Actuators and Microsystems, Anchorage, AK PY - 2015 TI - Small footprint nano-mechanical plasmonic phase modulators UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=918271 ER -