TY  - CONF
AU  - Potzick, James
AU  - Dixson, Ronald
AU  - Quintanilha, Richard
AU  - Stocker, Michael
AU  - Vladar, Andras
AU  - Buhr, Egbert
AU  - Bodermann, Bernd
AU  - Hassler-Grohne, Wolfgang
AU  - Bosse, Harald
AU  - Frase, C.G.
C2  - Proceedings SPIE Photomask 2008 (BACUS), Monterey, CA
DA  - 2008-10-17
LA  - en
PB  - Proceedings SPIE Photomask 2008 (BACUS), Monterey, CA
PY  - 2008
TI  - International photomask linewidth comparison by NIST and PTB
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=824713
ER  -