TY  - JOUR
AU  - Gaither, Michael
AU  - DelRio, Frank
AU  - Gates, Richard
AU  - Fuller, Edwin
AU  - Cook, Robert
C2  - Journal of Microelectromechanical Systems
DA  - 2010-05-18
LA  - en
M1  - 63
PB  - Journal of Microelectromechanical Systems
PY  - 2010
TI  - Strength distribution of single-crystal silicon theta-like specimens
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=904988
ER  -