TY  - JOUR
AU  - Ji, B
AU  - Motika, S
AU  - Badowski, P
AU  - Dheandhanoo, S
AU  - Timmons, C
AU  - Hess, D
AU  - Benck, Eric
AU  - Ye, Y
C2  - Abstracts Of Papers Of The American Chemical Society
DA  - 2021-10-12 15:10:24
LA  - en
PB  - Abstracts Of Papers Of The American Chemical Society
PY  - 2021
TI  - The Role of Fluorine Chemistry in Anisotropic Etching of Dielectric Materials
ER  -