TY - JOUR AU - Josell, Daniel AU - Wheeler, Daniel AU - Huber, W AU - Moffat, Thomas C2 - Physical Review Letters DA - 2001-07-01 00:07:00 LA - en M1 - 87 PB - Physical Review Letters PY - 2001 TI - Superconformal Electrodeposition in Submicron Features UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853028 ER -