TY  - JOUR
AU  - Ahn, Jungjoon
AU  - Solares, Santiago
AU  - You, Lin
AU  - Noh, Hanaul
AU  - Kopanski, Joseph
AU  - Obeng, Yaw
C2  - Journal of Applied Physics
DA  - 2019-02-20 00:02:00
DO  - https://doi.org/10.1063/1.5065385
LA  - en
M1  - 125
PB  - Journal of Applied Physics
PY  - 2019
TI  - Probe assisted localized doping of aluminum into silicon substrates
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=925130
ER  -