TY  - JOUR
AU  - Stan, Gheorghe
AU  - Gates, Richard
AU  - Kavuri, Premsagar
AU  - Torres, Jessica
AU  - Michalak, David
AU  - Ege, Canay
AU  - Bielefeld, Jeff
AU  - King, Sean
C2  - Applied Physics Letters
DA  - 2014-10-15
LA  - en
PB  - Applied Physics Letters
PY  - 2014
TI  - Mechanical property changes in porous low-k dielectric thin films during processing
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=916271
ER  -