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Vincent Luciani

Vincent Luciani is the NanoFab Manager. He joined CNST in November of 2008 with over 30 years of private industry experience in semiconductor and nanotechnology process development and project management. Vincent began his career at Solarex Corp. producing photovoltaic solar cells. He then joined the Bendix Advanced Technology Center, developing electronic and nanotechnology devices and processes in a variety of semiconductor material systems, including silicon, gallium arsenide, indium phosphide and lithium niobate. When Bendix became part of Allied-Signal, Vincent went on to lead their advanced process development team, and was awarded an Allied-Signal Premier Achievement Award for excellence in Engineering. Prior to joining NIST, he led the process and product engineering teams at Covega Corporation, developing and ramping up the production of novel indium phosphide photonic devices. Vincent is an expert in Project Management, with a Six Sigma Blackbelt, and holds five patents in semiconductor and nanofabrication technology.

Selected Publications
  • The evaluation of photo/e-beam complementary grayscale lithography for high topography 3D structure, L. Yu, R. J. Kasica, R. N. Newby, L. Chen, and V. K. Luciani, Proceedings of SPIE 8682, 868212 (2013).
  • A phosphine sub atmospheric delivery system (SADS) applied to low pressure chemical vapor deposition (LPCVD) of in situ doped polysilicon, J. Bowser, W. Young, L. Chen, and V. Luciani, in Proceedings of the University/Government/Industry, Micro/Nano Symposium (UGIM), 2012 19th Biennial, (Berkeley, CA, 2012), p. 1.
  • Effect of alternating Ar and SF6/C4F8 gas flow in Si nano-structure plasma etching, L. Chen, V. Luciani, and H. Miao, Microelectronic Engineering 88, 2470–2473 (2011).
  • Nanofabrication techniques for controlled drug-release devices, L. Chen, G. Henein, and V. Luciani, Nanomedicine 6, 1–6 (2011).
Staff Photo - Vincent Luciani


NanoFab Manager
Nanofabrication Operations Group

Phone: 301-975-2886
Email: vincent.luciani@nist.gov