CORAL Name: RTA
This system uses 21-1200W lamps to control temperature ramps and steady state temperatures from 250 degrees to 1200 degrees C anneals
Specifications / Capabilities:
Silicon Wafers only
Scientific Opportunities / Applications:
Access to this machine follows standard NanoFab operating hours (7am - 7pm Monday - Friday). Out of hours access requires prior approval by the NanoFab Manager.
Name: Jerry Bowser