CORAL Name: Unaxis Deep Si Etcher
A tool for etching deep Si-trench by "Bosch" process on planar substrates up to 150mm in diameter
Specifications / Capabilities:
Scientific Opportunities / Applications:
Deep Si etch
Access to this machine follows standard NanoFab operating hours (7am - 7pm Monday - Friday). Out of hours access requires prior approval by the NanoFab Manager.
Name: Lei Chen