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Parylene Deposition: Specialty Coating Systems PDS-2010


CORAL Name:  Parylene Deposition

This system deposits conformal coatings of Parylene N or C.  Parylene is applied at room temperature

Specifications / Capabilities:

  • The raw material dimer is vaporized under vacuum and heated to a gas which is pyrolized to cleave the dimer to its monomeric form.  In the room temperature deposition chamber, the monomer gas deposits as a transparent polymer file
  • The thickness of coatings can range from the hundreds of angrstroms to several tens of micrometers
  • Two chamber sized accomodate substrates from millimeters across to a maximum of 31cm Dia. X 28cm H

Scientific Opportunities / Applications:

  • These polymers are widely used in medical devices and for electronics and automotive application
  • Coatings are biocompatible and biostable and pinhole-free
  • Material provide moisture, chemical and dielectric barriers, as well as low coefficient of friction

Access Information:

Access to this tool requires that you have attended NanoFab safety orientation, passed the safety test, and have been properly trained on the tool. If you have any questions, please contact the NanoFab User Coordinator, or the tool contact person.



Parylene Deposition System

Operating Schedule:

Access to this machine follows standard NanoFab operating hours (7am - 7pm Monday - Friday).  Out of hours access requires prior approval by the NanoFab Manager.


Name: Jerry Bowser
Phone: 301.975.8187
100 Bureau Drive, Stop 6201
Gaithersburg, MD 20899-6201