NIST logo

NanoFab Equipment Management Operation (NEMO) Tutorial

This tutorial is designed to help users learn how to use the  NanoFab Equipment Management Operation (NEMO) system.

Equipment Scheduling Using NEMO

Download a printer friendly PDF


I. Accessing NEMO

NanoFab Internal and External Users will be able to access NEMO from NanoFab tool workstations located in the labs. On the NEMO login screen enter in your NEMO username and password and press "OK" to complete the authentication process and access NEMO Once the authentication is complete you will be taken to the NEMO homepage.

If you are a NIST employee or associate you can have access to NEMO from your NIST office network computer workstations as well. In order to access NEMO from your NIST office network computer workstations, you will need to launch a web browser (either Internet Explorer or Mozilla Firefox) and enter http://nemo.nist.gov into the web browser’s address bar. This will launch the NEMO login screen. On the NEMO login screen enter in your NEMO username and password and press "OK" to complete the authentication process and access NEMO. Once the authentication is complete you will be taken to the NEMO homepage.

If you do not have a NEMO username and password or have forgotten this information, please contact the NanoFab User Office.

Return to top of page

II. Making Reservations

To create tool reservations first locate the tool for which you would like to make a reservation. For this example we will create a tool reservation for the Profilometer 2 for May 24th, 10 am to 12 pm. From the Calendar screen, click on the Metrology tool category tree to list the tools under that category. (Figure 1)

NEMO figure1_accessing_tools_category_tree(sm)
Figure 1: Accessing tools listed in tool category tree.

Click on Profilometer 2 to display the reservation calendar for this tool. (It will become highlighted once you click on it). (Figure 2)

NEMO figure2_accessing tool_calendar_screen
Figure 2: Accessing tool calendar screen.

Click and drag on the calendar screen to create your tool reservation for the Profilometer 2 for May 24th, 10 am to 12 pm. (Figure 3)

NEMO figure3_creating_tool_reservation
Figure 3: Creating tool reservation.

Click on the tool reservation box to display the tool reservation. You have created a tool reservation for the Profilometer 2 on May 24th, 10 am to 12 pm. (Figure 4)

NEMO figure4_confirming_tool_reservation
Figure 4: Confirming tool reservation.

Return to top of page

III. Updating Reservations

To update tool reservations, first locate the tool reservation that you would like to update. For this example we will update the tool reservation on May 23rd, 10 am to 1 pm for the Critical Point Dryer 1. We will change the tool reservation time to reserve the tool from 11 am to 1 pm. From the Calendar screen, click on the Specialty Tools tool category tree to list the tools under that category. (Figure 5)

NEMO figure5_accessing_tools_category_tree
Figure 5: Accessing tools listed in tool category tree.

Click on the Critical Point Dryer 1 to display the reservation calendar for this tool. (Figure 6)

NEMO figure6_accessing_tool_calendar
Figure 6: Accessing tool calendar screen

Click on the tool reservation box located on the reservation calendar on May 23rd, 10 am to 1 pm, and drag the reservation box downward so the start time will be 11 am. (Figure 7)

NEMO figure7_changing_start_time
Figure 7: Changing tool reservation start time.

Move the cursor to the bottom of the tool reservation box. Click and drag the bottom of the box upward to 1 pm on the calendar. (Figure 8)

NEMO figure8_changing_end_time
Figure 8: Changing tool reservation end time.

Click on the tool reservation box to confirm your updated tool reservation. You have updated the tool reservation for the Critical Point Dryer 1 from 10 am to 1 pm to 11 am to 1 pm for May 23rd. (Figure 9)

NEMO figure9_confirming_update
Figure 9: Confirming tool reservation update.


Return to top of page

IV. Deleting Tool Reservations

To delete tool reservations first locate the tool reservation that you would like to delete. For this example we will delete the tool reservation on May 24th, 9 am to 12 pm for the JOEL E-Beam. From the Calendar screen, click on the Lithography tool category tree to list the tools under that category. (Figure 10)

NEMO figure10_accessing_tools_category_tree
Figure 10: Accessing tools listed in tool category tree.

Click on the JEOL E-Beam to display the reservation calendar for this tool. (Figure 11)

NEMO figure11_accesing_tool_calendar
Figure 11: Accessing tool calendar screen.

Click on the tool reservation box located on May 24th, 9 am to 12 pm. Click on Cancel this reservation. (Figure 12)

NEMO figure12_canceling_tool_reservation
Figure 12: Canceling tool reservation.

You have deleted the tool reservation for May 24th, 9 am to 12 pm for the JEOL E-Beam. (Figure 13)

NEMO figure13_confirming_toll_reservation
Figure 13: Confirming tool reservation cancellation.

Return to top of page

V. Enabling/Disabling Tools

To enable tool equipment first locate the tool that you would like to enable. For this example we will enable and disable the FEI FIB 2. From the Tool Control screen, click on the Focus Ion Beams tool category tree to list the tools under that category. (Figure 14)

NEMO figure14_accessing_tools_category_tree
Figure 14: Accessing tools listed in tool category tree.

Click on the FEI FIB 2. (Figure 15)

NEMO figure15_accessing_tool_operation
Figure 15: Accessing tool operation screen.

**NOTICE**: If you have more than one active NanoFab project you will need to choose which project to charge your tool activity time to. If you only have one active NanoFab project it will automatically be displayed here with no choice option. Choose the NanoFab project that you want to charge the tool activity to (if applicable). (Figure 16)

NEMO figure16_choosing_project
Figure 16: Choosing NanoFab project to charge tool time to (if applicable).

Click on Start using the FEI FIB 2. (Figure 17)

NEMO figure17_enabling_tool
Figure 17: Enabling the tool.

You have now enabled the FEI FIB 2 tool. Once you are finished using the tool you will need to disable the tool. To disable the tool click on Finish using the FEI FIB 2. Figure 18)

NEMO figure18_disabling_tool
Figure 18: Disabling the tool.

The FEI FIB 2 tool has now been disabled and is no longer in use. (Figure 19)

NEMO figure19_confirming_tool_disabled
Figure 19: Confirming tool is disabled and no longer in use.


Return to top of page

VI. Logging in and out of the Cleanroom

**All users must be logged in as a cleanroom user when they are inside the cleanroom**
To log in as a cleanroom user click on Enter the cleanroom. (Figure 20)

NEMO figure20_log_into_cleanroom
Figure 20: Logging into the cleanroom.

**Notice** If you have more than one active NanoFab project you will need to choose which project you want to bill your cleanroom access time to. If you only have one active NanoFab project this option will not be available to you. Click on the NanoFab project that you want to bill your cleanroom access time to. (Figure 21)

NEMO figure21_choose_project
Figure 21: Choosing a NanoFab project to charge cleanroom access time to.

You are now logged in as a cleanroom user and your NanoFab project will be charged your cleanroom access time. When you leave the cleanroom you will need to logout to stop your cleanroom access time charge. Click on Exit the cleanroom. (Figure 22)

NEMO figure22_log_out_cleanroom
Figure 22: Logging out of the cleanroom.

You are now logged out as a cleanroom user and your NanoFab project is no longer charged your cleanroom access time. (Figure 23)

NEMO figure23_confirm_logout
Figure 23: Confirming that you are logged out of the cleanroom.


Return to top of page

VII. Posting a Comment

To post a comment first locate the tool that you would like to post a comment on. For this example we will post a comment on the Gen. Dry Ox. From the Tool control screen, click on the Gen Furnaces tool category tree to list the tools under that category. (Figure 24)

NEMO figure24_accessing_tools
Figure 24: Accessing tools listed in tool category tree

Click on Gen. Dry Ox. (Figure 25)

NEMO figure25_tool_operation_screen
Figure 25: Accessing tool operation screen.

Click on post a comment. (Figure 26)

NEMO figure26_access_post_comment_box
Figure 26: Accessing posting a comment information box.

This information text box will allow you to post a comment for the Gen. Dry Ox. You can determine how many days you want the comment to be displayed. Make sure you leave a detailed comment for informative purposes pertaining to the use of the tool. (Figure 27)

NEMO figure27_select_days_comment_displayed
Figure 27: Selecting days comment is displayed.

Once you have completed entering the information for the comment click on Post comment. (Figure 28)

NEMO figure28_posting_comment
Figure 28: Posting a comment.

Your comment has been added. You can hide a comment that you added at any time if the comment is no longer appropriate for the usage of the tool and you are the author of the comment. Click on Hide. (Figure 29)

NEMO figure29_hide_comment
Figure 29: Hiding a comment.

The comment is now hidden from other users since it is no longer valid for usage of the tool. (Figure 30)

NEMO figure30_confirm_comment_hidden
Figure 30: Confirming comment is hidden.


Return to top of page

VIII. Reporting Tool Problems

To report a problem first locate the tool that you would like to report a problem on. For this example we will report a problem on the Wet Etch 1 Tool. From the Tool Control screen, click on the Wet Chemistry tool category tree to list the tools under that category. (Figure 31)

NEMO figure31_accessing_tools_category_tree
Figure 31: Accessing tools listed in tool category tree.

Click on Wet Etch1. (Figure 32)

NEMO figure32_access_tool_operation_screen
Figure 32: Accessing tool operation screen.

Click on report a problem or shut down. (Figure 33)

NEMO figure33_accessing_report_problem
Figure 33: Accessing report a problem or shut down information box.

The problem report information text box will allow you to report a problem for the Wet Etch 1. Make sure that you provide a detailed description of the problem in the text box so NanoFab staff can address the problem accordingly. You can choose a problem category that best describes the problem if appropriate. (Figure 34)

NEMO figure34_choose_problem_category
Figure 34: Choosing problem category if appropriate.

The problem report information box includes check boxes allowing you to either flag this tool problem as a Safety Hazard or Tool Shutdown or both if applicable to the problem report. Once you complete entering in all the appropriate information for the report click on Send report. (Figure 35)

NEMO figure35_fill_out_problem_report
Figure 35: Filling out problem report and submitting report.

Your tool problem report has been logged and the appropriate NanoFab staff has been alerted about the tool problem. If you make a mistake in reporting a tool problem you can cancel the tool problem report by clicking on cancel. Doing this will delete the tool problem report for the tool. (Figure 36)

NEMO figure36_cancel_problem_report
Figure 36: Canceling a problem report.

Your tool problem report has been deleted. (Figure 37)

NEMO figure37_confirm_problem_report_deleted
Figure 37: Confirming problem report deleted.

Return to top of page