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NanoFab Equipment Management Operation (NEMO) Tutorial

This tutorial is designed to help users learn how to use the  NanoFab Equipment Management Operation (NEMO) system.

Equipment Scheduling Using NEMO



I. Accessing NEMO

NanoFab Internal and External Users will be able to access NEMO from NanoFab tool workstations located in the labs. On the NEMO login screen enter in your NEMO username and password and press "OK" to complete the authentication process and access NEMO. Once the authentication is complete you will be taken to the NEMO homepage.

If you are a NIST employee or associate, you can have access to NEMO from your NIST office network computer workstations as well. In order to access NEMO from your NIST office network computer workstations, you will need to launch a web browser (either Internet Explorer or Mozilla Firefox) and enter https://nemo.nist.gov into the web browser’s address bar. This will launch the NEMO login screen. On the NEMO login screen enter in your NEMO username and password and press "OK" to complete the authentication process and access NEMO. Once the authentication is complete you will be taken to the NEMO homepage.

If you do not have a NEMO username and password or have forgotten this information, please contact the NanoFab User Office.

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II. Making Reservations

To create tool reservations first locate the tool for which you would like to make a reservation. For this example we will create a tool reservation for the Profilometer 2 for July 24th, 10 am to 12 pm.  First access the Calendar screen.  From the Calendar screen, you can either click on the Metrology tool category tree to list the tools under that category to locate the Profilometer 2 or type in the tool name in the “Search for a tool” to locate the tool.  See figures 1 and 2 for examples of each.

Figure 1: Accessing the Profilometer 2 tool in the Metrology tool category tree.
Figure 1:  Accessing the Profilometer 2 tool in the Metrology tool category tree.


Figure 2:  Accessing the Profilometer 2 tool from the “Search for a tool” text box field. 
Figure 2:  Accessing the Profilometer 2 tool from the “Search for a tool” text box field.  

Once you located the Profilometer 2 tool click on the Profilometer 2 link to display the reservation calendar for this tool.  Then click and drag on the calendar screen to create your tool reservation for the Profilometer 2 for July 24th, 10 am to 12 pm.  

Figure 3: Creating tool reservation
Figure 3: Creating tool reservation.

Click on the tool reservation box to display the tool reservation. You have created a tool reservation for the Profilometer 2 on July 24th, 10 am to 12 pm. 

Figure 4:  Confirming tool reservation.
Figure 4:  Confirming tool reservation.

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III. Updating Reservations

To update tool reservations, first locate the tool reservation that you would like to update. For this example we will update the tool reservation on July 24th, 10 am to 1 pm for the Critical Point Dryer 1. We will change the tool reservation time to reserve the tool to 11 am to 1 pm. First access the Calendar screen.  From the Calendar screen, you can either click on the Specialty Tools tool category tree to list the tools under that category to locate the Critical Point Dryer 1 or type in the tool name in the “Search for a tool” to locate the tool.  See figures 5 and 6 for examples of each.  

Figure 5:  Accessing the Critical Point Dryer 1 in the Specialty Tools tool category tree.
Figure 5:  Accessing the Critical Point Dryer 1 in the Specialty Tools tool category tree.

Figure 6:  Accessing the Critical Point Dryer 1 tool from the “Search for a tool” text box field.
Figure 6:  Accessing the Critical Point Dryer 1 tool from the “Search for a tool” text box field.  

Click on the tool reservation box located on the reservation calendar on July 24th, 10 am to 1 pm, and drag the reservation box downward so the start time will be 11 am.  

Figure 7: Change tool reservation start time.
Figure 7:  Changing tool reservation start time.

Move the cursor to the bottom of the tool reservation box. Click and drag the bottom of the box upward to 1 pm on the calendar.  

Figure 8:  Changing tool reservation end time.
Figure 8:  Changing tool reservation end time.

Click on the tool reservation box to confirm your updated tool reservation. You have updated the tool reservation for the Critical Point Dryer 1 from 10 am to 1 pm to 11 am to 1 pm for July 24th.  

Figure 9:  Confirming tool reservation update.
Figure 9:  Confirming tool reservation update.

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IV. Deleting Tool Reservations

To delete tool reservations first locate the tool reservation that you would like to delete. For this example we will delete the tool reservation on July 24th, 9 am to 12 pm for the JOEL E-Beam. First access the Calendar screen.  From the Calendar screen, you can either click on the Lithography tool category tree to list the tools under that category to locate the JEOL E-beam or type in the tool name in the “Search for a tool” to locate the tool.  See figures 10 and 11 for examples of each. 

Figure 10:  Accessing the JOEL E-Beam tool in the Lithography tool category tree.
Figure 10:  Accessing the JOEL E-Beam tool in the Lithography tool category tree.

Figure 11:  Accessing the JOEL E-Beam tool from the “Search for a tool” text box field.
Figure 11:  Accessing the JOEL E-Beam tool from the “Search for a tool” text box field.  

Click on the tool reservation box located on July 24th, 9 am to 12 pm. Click on Cancel this reservation.  

Figure 12:  Cancelling tool reservation.
Figure 12:  Cancelling tool reservation.

You have deleted the tool reservation for July 24th, 9 am to 12 pm for the JEOL E-Beam.

Figure: 13 Confirming tool reservation cancellation.
Figure: 13 Confirming tool reservation cancellation.

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V. Enabling/Disabling Tools

To enable tool equipment first locate the tool that you would like to enable. For this example we will enable and disable the Ellipsometer.  First access the  screen.  From the Tool control screen, you can either click on the Metrology tool category tree to list the tools under that category to locate the Elliposmeter or type in the tool name in the “Search for a tool” to locate the tool.  See figures 14 and 15 for examples of each.   

Figure 14:  Accessing the Ellipsometer tool in the Metrology tool category tree.
Figure 14:  Accessing the Ellipsometer tool in the Metrology tool category tree.

Figure 15:  Accessing the Ellipsometer tool from the “Search for a tool” text box field.
Figure 15:  Accessing the Ellipsometer tool from the “Search for a tool” text box field.  

**NOTICE**: If you have more than one active NanoFab project you will need to choose which project to charge your tool activity time to. If you only have one active NanoFab project it will automatically be displayed here with no choice option. Choose the NanoFab project that you want to charge the tool activity to (if applicable).  

Figure 16:  Choosing NanoFab project to charge tool time to (if applicable).
Figure 16:  Choosing NanoFab project to charge tool time to (if applicable).

Click on Start using the Ellipsometer.  

Figure 17:  Enabling the Ellipsometer tool.
Figure 17:  Enabling the Ellipsometer tool.

You have now enabled the Ellipsometer tool on the “Microfludics” NanoFab project. Once you are finished using the tool you will need to disable the tool. To disable the tool click on Stop using the Ellipsometer

Figure 18:  Disabling the Ellipsometer tool.
Figure 18:  Disabling the Ellipsometer tool. 

The Ellipsometer tool has now been disabled and is no longer in use.  

Figure 19:  Confirming Ellipsometer tool is disabled and no longer in use.
Figure 19:  Confirming Ellipsometer tool is disabled and no longer in use.

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VI. Logging in and out of the Cleanroom

**All users must be logged in as a cleanroom user when they are inside the cleanroom**
To log in as a cleanroom user click on Enter the cleanroom.  

Figure 20:  Logging into the cleanroom.
Figure 20:  Logging into the cleanroom.

**Notice** If you have more than one active NanoFab project you will need to choose which project you want to bill your cleanroom access time to. If you only have one active NanoFab project this option will not be available to you. Click on the NanoFab project that you want to bill your cleanroom access time to (if applicable).  

Figure 21: Choosing a NanoFab project to charge cleanroom access time to.
Figure 21:  Choosing a NanoFab project to charge cleanroom access time to.

You are now logged in as a cleanroom user and your NanoFab project will be charged your cleanroom access time. If you have multiple projects and want to confirm which project that you are charging to you can verify this by clicking on Status dashboard and then click Cleanroom occupancy.  When you leave the cleanroom you will need to logout to stop your cleanroom access time charge. Click on Exit the cleanroom.  

Figure 22:  Confirming what project you are charging your cleanroom access time to and exiting the cleanroom. 
Figure 22:  Confirming what project you are charging your cleanroom access time to and exiting the cleanroom.  

You are now logged out as a cleanroom user and your NanoFab project is no longer charged your cleanroom access time.  

Figure 23:  Confirming that you are logged out of the cleanroom.
Figure 23:  Confirming that you are logged out of the cleanroom.

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VII. Posting a Comment

To post a comment first locate the tool that you would like to post a comment on. For this example we will post a comment on the ZEISS FESEM. First access the Tool control screen.  From the Tool control screen, you can either click on the Imaging and Analysis tool category tree to list the tools under that category to locate the ZEISS FESEM or type in the tool name in the “Search for a tool” to locate the tool.  See figures 24 and 25 for examples of each.      

Figure 24: Accessing the Zeiss FESEM tool in the Imaging and Analysis tool category tree.
Figure 24:  Accessing the ZEISS FESEM tool in the Imaging and Analysis tool category tree. 

Figure 25:  Accessing the ZEISS FESEM tool from the “Search for a tool” text box field. 
Figure 25:  Accessing the ZEISS FESEM tool from the “Search for a tool” text box field.  

Click on Post a comment.  

Figure 26:  Accessing posting a comment information box.
Figure 26:  Accessing posting a comment information box.

This information text box will allow you to Post a comment for the ZEISS FESEM. You can determine how many days you want the comment to be displayed. Make sure you leave a detailed comment for informative purposes pertaining to the use of the tool.  

Figure 27:  Selecting days comment is displayed and typing in a detailed comment for informative purposes pertaining to the use of the tool.
Figure 27:  Selecting days comment is displayed and typing in a detailed comment for informative purposes pertaining to the use of the tool.

Once you have completed entering the information for the comment click on Post comment.  

Figure 28:  Posting a comment.
Figure 28:  Posting a comment.

Your comment has been added. You can hide a comment that you added at any time if the comment is no longer appropriate for the usage of the tool and you are the author of the comment.  Click on the message icon to the left of your comment.  The click on Hide this comment

Figure 29:  Hiding a comment. 
Figure 29:  Hiding a comment.  

The comment is now hidden from other users since it is no longer valid for usage of the tool. 

Figure 30:  Confirming comment is hidden.
Figure 30:  Confirming comment is hidden.

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VIII. Reporting Tool Problems

To Report a problem first locate the tool that you would like to report a problem on. For this example we will report a problem on the Wet Etch 1 Tool. First access the Tool control screen.  From the Tool control screen, you can either click on the Wet Chemistry tool category tree to list the tools under that category to locate the Wet Etch 1 or type in the tool name in the “Search for a tool” to locate the tool.  See figures 31 and 32 for examples of each.  

Figure 31:  Accessing the Wet Etch 1 tool in the Wet Chemistry tool category tree.
Figure 31:  Accessing the Wet Etch 1 tool in the Wet Chemistry tool category tree.

Figure 32:  Accessing the Wet Etch 1 tool from the “Search for a tool” text box field. 
Figure 32:  Accessing the Wet Etch 1 tool from the “Search for a tool” text box field.  

Click on Report a problem.  

Figure 33:  Accessing report a problem information box.
Figure 33:  Accessing report a problem information box.

The problem report information text box will allow you to report a problem for the Wet Etch 1. Make sure that you provide a detailed description of the problem in the text box so NanoFab staff can address the problem accordingly. You can choose a problem category that best describes the problem if appropriate. 

NEMO Tutorial, Figure 34:  Choosing problem category if appropriate.
Figure 34:  Choosing problem category if appropriate.

The problem report information box includes check boxes allowing you to either flag this tool problem as a Safety Hazard or Tool Shutdown or both if applicable to the problem report. Once you complete entering in all the appropriate information for the report click on Report problem.  

NEMO Tutorial, Figure 35:  Filling out problem report and submitting report.
Figure 35:  Filling out problem report and submitting report.

Your tool problem report has been logged and the appropriate NanoFab staff has been alerted about the tool problem. If you make a mistake in reporting a tool problem you can cancel the tool problem.  Click on the wrench icon then click on cancel. Doing this will delete the tool problem report for the tool.  

NEMO Tutorial, Figure 36:  Canceling a problem report.Your tool problem report has been deleted.

NEMO Tutorial, Figure 37:  Confirming problem report deleted.
Figure 37:  Confirming problem report deleted.

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