Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

NanoFab Equipment

Over 100 commercial tools are available within the NanoFab's 5600 m2 (60,000 ft2) of advanced laboratory space, which includes 1800 m2 (19,000 ft2) of cleanroom. Most tools are located in the 750 m2 (8,000 ft2) class 100 cleanroom. Our key capabilities, tools, and processes are summarized below.


Lithography

Soft Lithography

Focused Ion Beam Nanofabrication and Characterization

Advanced Imaging and Analysis

Imaging and Analysis Sample and Substrate Preparation

Metrology

Thin Film Deposition and Processing

Dry Etch

Back-End-of-Line Tools

Wet Chemistry

Created September 13, 2013, Updated January 11, 2024