Orji, N.
, Martinez, A.
, Bunday, B.
, Allgair, J.
and Vorburger, T.
(2007),
Progress on Implementation of a Reference Measurement System based on a Critical-dimension Atomic Force Microscope, J. Micro/Nanolith
(Accessed April 24, 2024)
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Progress on Implementation of a Reference Measurement System based on a Critical-dimension Atomic Force Microscope
Published
Author(s)
, Angela Martinez, B Bunday, J Allgair,
Citation
J. Micro/Nanolith
Volume
6
Issue
2
Pub Type
Journals
Citation
Created April 1, 2007, Updated February 19, 2017