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PUBLICATIONS

Linewidth Measurement Based on Automatically Matched and Stitched Images

Published

Author(s)

Wei Chu, Joseph Fu, Ronald G. Dixson, Theodore V. Vorburger

Abstract

The emergence of ultra-sharp carbon nanotube (CNT) tips provides a new approach to minimize the distortion of the measured linewidth profile caused by interaction with the fmite probe tip size. However, the inevitable tilt angle resulting from attaching the nanotube to an ordinary probe causes a significant probe-related distortion on one sidewall of the linewidth sample. In order to obtain accurate images at both sidewalls, the sample is measured twice. After the first measurement which provides an accurate image on one sidewall, the sample is rotated 180 degrees to measure the other sidewall. The two images are stitched together as a composite image in which both sidewall images are minimally distorted. To accurately stitch the two images, their position difference caused by the l80 degree rotation must be eliminated. In this paper, the template matching method is adopted after the primary image processing that includes surface leveling and rotation. At the optimum matching position, these two images are stitched as a composite image, in which the average linewidth and the standard deviation are calculated.
Proceedings Title
Proceedings of the International Conference on Frontiers of Characterization and Metrology for Nanoelectronics: 2007
Volume
931
Conference Dates
March 27-29, 2007
Conference Location
Harbin, 1, CH
Conference Title
International Conference on Frontiers of Characterization and Metrology for Nanoelectronics: 2007
Pub Type
Conferences

Keywords

linewidth, atomic force microscopy (AFM), carbon nanotube probe, image stitching, template matching
Metrology and Manufacturing

Citation

Chu, W. , Fu, J. , Dixson, R. and Vorburger, T. (2007), Linewidth Measurement Based on Automatically Matched and Stitched Images, Proceedings of the International Conference on Frontiers of Characterization and Metrology for Nanoelectronics: 2007, Harbin, 1, CH (Accessed April 18, 2024)

Created December 31, 2006, Updated October 12, 2021