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Publication Citation: Nanoscale Focused Ion Beam from Laser-cooled Lithium Atoms

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Author(s): Brenton J. Knuffman; Adam V. Steele; Jon Orloff; Jabez J. McClelland;
Title: Nanoscale Focused Ion Beam from Laser-cooled Lithium Atoms
Published: October 26, 2011
Abstract: To advance the capabilities of focused ion beam (FIB) technology, we have created a low-energy FIB from photoionized lithium atoms collected in a magneto-optical trap (MOT). This magneto-optical trap ion source relies on both the low temperature of the laser-cooled atoms and the small energy spread of the resultant beam to form a nanoscale ion probe at its focus. We present examples of microscopy with lithium ions obtained by scanning the FIB and collecting the resulting secondary electrons. The size of the beam focus has been characterized with a rise distance measurement to be d_{25/75} = 26.7 +/- 1.0 nm at a beam energy of 2 keV. We have also characterized the focal size as a function of temperature of atoms in the MOT and beam energy.
Citation: New Journal of Physics
Volume: 13
Issue: 10
Keywords: MOTIS; FIB; focused ion beam; laser cooling; magneto-optical trap; ion source; nanotechnology; microscopy;
Research Areas: Laser Cooling, Focused ion beam imaging (FIB)
PDF version: PDF Document Click here to retrieve PDF version of paper (337KB)