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Publication Citation: A high-bandwidth electromagnetic MEMS motion stage for scanning applications

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Author(s): Young M. Choi; Nicholas G. Dagalakis; Jason J. Gorman; Seung Ho Yang; Yong Sik Kim; Jae M. Yoo;
Title: A high-bandwidth electromagnetic MEMS motion stage for scanning applications
Published: August 23, 2012
Abstract: This paper presents the design, fabrication and experimental results of an out-of-plane electromagnetic motion stage. The combination of electromagnetic actuation and a flexure-supported platform enables bidirectional motion with high precision as well as linear characteristics. A planar microcoil and a permanent magnet generate Lorentz force, which drives the flexure-supported platform directly. The copper microcoil is electroplated on a silicon substrate and the platform is fabricated through silicon bulk micromachining of silicon-on-insulator wafers. The resonance frequency of the fabricated micro stage is 2.0 kHz which can give an open-loop control bandwidth larger than 500 Hz. Experimental results verify highly linear bidirectional motion without any hysteresis or nonlinearity. Also, excellent high-frequency open-loop tracking control performance is demonstrated.
Citation: Journal of Micromechanics and Microengineering
Volume: 22
Issue: 10
Pages: 9 pp.
Keywords: MEMS; scanning; electromagnetic actuator
Research Areas: Microelectronics
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