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Publication Citation: A Phosphine Sub Atmospheric Delivery System (SADS) applied to Low Pressure Chemical Vapor Deposition (LPCVD) of in situ doped Polysilicon.

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Author(s): Vincent K. Luciani; William D. Young Jr; Lei Chen; Jerry L. Bowser;
Title: A Phosphine Sub Atmospheric Delivery System (SADS) applied to Low Pressure Chemical Vapor Deposition (LPCVD) of in situ doped Polysilicon.
Published: July 23, 2012
Abstract:
Proceedings: University Government Industry Micro/Nano Symposium
Pages: 1 pp.
Location: Berkeley, CA
Dates: July 9-10, 2012
Research Areas: Nanotechnology, Deposition
DOI: http://dx.doi.org/10.1109/UGIM.2012.6247086  (Note: May link to a non-U.S. Government webpage)
PDF version: PDF Document Click here to retrieve PDF version of paper (67KB)