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Publication Citation: Large Stroke Electrostatic Comb-Drive Actuators Based on a Novel Flexure Mechanism

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Author(s): Mohammad Olfatnia; Siddharth Sood; Jason J. Gorman; Shorya Awtar;
Title: Large Stroke Electrostatic Comb-Drive Actuators Based on a Novel Flexure Mechanism
Published: June 20, 2012
Abstract: This paper reports in-plane electrostatic comb-drive actuators with stroke as large as 245 µm, achieved by employing a novel Clamped Paired Double Parallelogram (C-DP-DP) flexure mechanism. For a given flexure beam length (L1), comb gap (G), and actuation voltage (V), this is currently the largest comb-drive actuator stroke reported in the literature. The C-DP-DP flexure mechanism design offers high bearing direction stiffness (Kx) while maintaining low motion direction stiffness (Ky), over a large range of motion direction displacement. The resulting high (Kx /Ky) ratio mitigates the on-set of sideways snap-in instability, thereby offering significantly greater actuation stroke compared to existing designs.
Proceedings: Proceedings of the Hilton Head 2012: Solid-state Sensors, Actuators and Microsystems Workshop
Pages: pp. 409 - 412
Location: Hilton Head, SC
Dates: June 3-7, 2012
Keywords: Microelectromechanical systems; MEMS; electrostatic actuator; flexure mechanism; large stroke actuator
Research Areas: Nanomechanics, Microelectromechanical systems (MEMS), Nanotechnology
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