| Author(s): |
Yong Sik Kim; Nicholas G. Dagalakis; Satyandra K. Gupta; |
| Title: |
Design and Fabrication of a Three-DoF MEMS Stage Based on Nested Structures |
| Published: |
August 15, 2012 |
| Abstract: |
This paper presents the design, fabrication and testing of a Micro Electro Mechanical Systems (MEMS) based positioning stage which is capable of generating translational motions along X, Y and Z axes, respectively. For this purpose, two existing 1 Degree of Freedom (DOF) in-plane positioning stages and one existing 1 DOF out-of-plane actuator are merged into one system for 3 DOF motions. The 1 DOF stage has a platform to embed other systems. For a successful combination of three independent systems, two nested structures are adapted as a serial kinematic mechanism. With nested structures, one 1 DOF in-plane positioning stage is embedded into the other 1 DOF in-plane stage for in-plane translational motions along the X and Y axes. And then, one 1 DOF out-of-plane actuator is embedded for the translational motion along the Z axis. The proposed 3 DOF system has demonstrated ability to generate at least 20 μm along X, Y and Z axes, respectively. The cross talk between the three axes is also measured and is less than 4 percent of the intended displacement. |
| Proceedings: |
ASME 2012 International Design Engineering Technical Conference & Computers and Information in Engineering Conference (IDETC/CIE 2012)
|
| Pages: |
7 pp. |
| Location: |
Chicago, IL |
| Dates: |
August 12-15, 2012 |
| Keywords: |
Nanopositioning; MEMS actuator; 3 DOF |
| Research Areas: |
Nanofabrication, Nanomanufacturing, and Nanoprocessing |
| PDF version: |
 Click here to retrieve PDF version of paper (2MB) |
