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|Author(s):||Yong Sik Kim; Jae M. Yoo; Seung Ho Yang; Young M. Choi; Nicholas G. Dagalakis; Satyandra K. Gupta;|
|Title:||Design, fabrication, and testing of a serial kinematic MEMS XY stage for multi-finger manipulation|
|Published:||August 29, 2012|
|Abstract:||In micro-electro-mechanical systems (MEMS) it is difficult to obtain large range of motion with small coupled error. This limitation was overcome by designing and fabricating a nested structure as a serial kinematic mechanism (SKM). In this paper, a MEMS based XY stage is reported for multi-finger manipulation application. The SKM MEMS XY stage is implemented by embedding a single degree-of-freedom (DOF) stage into another single DOF stage. The proposed MEMS XY stage is fabricated by deep reactive ion etching (DRIE) from both sides of a silicon-on-insulator (SOI) wafer. This SKM MEMS stage has a capability to generate more than 50 μm displacements along each X and Y axis. This nested structure also suppressed the coupling motion error to 0.6% of the original actuation displacement. For the demonstration on the micro-particle manipulation, a 15 μm sized polypropylene particle is manipulated and rotated by operating two individual fingers attached to proposed MEMS stages.|
|Citation:||Journal of Micromechanic and Microengineering|
|Keywords:||XY-stage, coordinated manipulation, nested structure, a serial kinematic mechanism|
|PDF version:||Click here to retrieve PDF version of paper (2MB)|