Take a sneak peek at the new NIST.gov and let us know what you think!
(Please note: some content may not be complete on the beta site.).
NIST Authors in Bold
|Author(s):||Bryan M. Barnes; Martin Y. Sohn; Francois R. Goasmat; Hui Zhou; Richard M. Silver; Abraham Arceo;|
|Title:||Harnessing 3D Scattered Optical Fields for sub-20 nm Defect Detection|
|Published:||June 24, 2013|
|Abstract:||Experimental imaging at =193 nm of sub-resolved defects performed at several focus positions yields a volume of spatial and intensity data. Defects are located in a differential volume, given a reference, with up to 5x increase in sensitivity.|
|Conference:||Applied Industrial Optics: Spectroscopy, Imaging, and Metrology (AIO)|
|Proceedings:||OSA Technical Digest|
|Dates:||June 23-27, 2013|
|Keywords:||Industrial inspection, Three-dimensional image processing, optical metrology|
|Research Areas:||Process Metrology, Inspection, Optical microscopy, Optical Physics, Nanotechnology, Optical Technology|