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Publication Citation: Harnessing 3D Scattered Optical Fields for sub-20 nm Defect Detection

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Author(s): Bryan M. Barnes; Martin Y. Sohn; Francois R. Goasmat; Hui H. Zhou; Richard M. Silver; Abraham Arceo;
Title: Harnessing 3D Scattered Optical Fields for sub-20 nm Defect Detection
Published: June 24, 2013
Abstract: Experimental imaging at =193 nm of sub-resolved defects performed at several focus positions yields a volume of spatial and intensity data. Defects are located in a differential volume, given a reference, with up to 5x increase in sensitivity.
Conference: Applied Industrial Optics: Spectroscopy, Imaging, and Metrology (AIO)
Proceedings: OSA Technical Digest
Pages: 3 pp.
Location: Alexandria, VA
Dates: June 23-27, 2013
Keywords: Industrial inspection; Three-dimensional image processing; optical metrology
Research Areas: Process Metrology, Inspection, Optical microscopy, Optical Physics, Nanotechnology, Optical Technology