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Publication Citation: Block-copolymer healing of simple defects in a chemoepitaxial template

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Author(s): Paul N. Patrone; Gregg M. Gallatin;
Title: Block-copolymer healing of simple defects in a chemoepitaxial template
Published: April 11, 2013
Abstract: Using a phase-field model of block copolymers (BCPs), we characterize how a chemoepitaxial template with parallel lines of arbitrary width affects the BCP microdomain shape. The model, which is an extension of the Leibler-Ohta-Kawasaki theory, accounts for the polymer-substrate and polymer-air interactions. We derive formulas for the monomer density and the microdomain interface profile of periodic, lamellar BCP melts whose template lines are wider than the bulk microdomain width. For such systems, our analysis (i) shows that mass conservation causes the microdomain interfaces to oscillate about their bulk positions and (ii) determines the length scale over which these oscillations decay away from the substrate.
Citation: SPIE Conference Proceedings
Volume: 8680
Research Areas: Block copolymer lithography, Nanomanufacturing, Nanofabrication, Nanomanufacturing, and Nanoprocessing, Manufacturing
DOI: http://dx.doi.org/10.1117/12.2011656  (Note: May link to a non-U.S. Government webpage)
PDF version: PDF Document Click here to retrieve PDF version of paper (398KB)