Scanning Auger Electron Microscope

A JEOL model 7830F field emission source, scanning Auger microscope.

Ultra-high vacuum (UHV), electron gun range from 0.1 kV to 25 kV, hemispherical electron energy analyzer (0 keV to 3 keV), two-stage sample introduction, parking stage, backscattered electron detector, energy dispersive x-ray detector, Parallax UHV WDS (under development), 3 kV Ar ion gun, and non-monochromated Al and Mg x-ray sources. Capable of chemical and compositional analysis at the nanoscale, depth profiles, line profiles, and compositional mapping.