NIST logo
NIST Home > Nanomanufacturing Portal 

Nanomanufacturing Portal

Programs and Projects
Optical Methods for 3-D Nanostructure Metrology

We develop new approaches to optical microscopy and electromagnetic modeling to enable improved metrology of nanoscale structures with dimensions … more

Nanoelectronic Device Metrology

The Nanoelectronic Device Metrology (NEDM) project is developing the measurement science infrastructure that will enable emerging nanoelectronic … more

Atom-Based Dimensional Metrology

A primary goal of this project is to develop intrinsic calibration standards based on the crystalline lattice. The ultimate limit for nanoscale … more

Forensic Topography and Surface Metrology

Provide SI-traceable measurements and standards for ballistic and toolmark identification and surface texture and microform calibrations. Enable … more

Traceable Scanning Probe Nano-Characterization

Research and development of rigorously SI traceable nano-characterization instrumentation, measurements, and procedures to enable a fundamental … more

COMPLETED: Dimensional Metrology for Nanoscale Patterns

Our goal is to develop and demonstrate precise measurement methods that quantify the physical shape, critical dimensions (CD) and the structure of … more

*
Bookmark and Share

Contact

General Information:
301-975-NIST (6478)
inquiries@nist.gov

100 Bureau Drive, Stop 1070
Gaithersburg, MD 20899-1070