Take a sneak peek at the new NIST.gov and let us know what you think!
(Please note: some content may not be complete on the beta site.).
Reference Materials Planned for Semiconductor Industry
June 30, 2005
Companies and research organizations are invited to collaborate with the National Institute of Standards and Technology (NIST) and SEMATECH in the development and evaluation of a new generation of reference materials for the semiconductor and tool manufacturing industries. The work is a continuation of NIST's efforts to provide standard "rulers" for measuring chip features. The new reference materials will differ from the previous generation in several ways. Current plans call for each reference material to be configured as a 200-millimeter wafer with a selection of die sites, each with multiple test structures with certified critical dimensions between 40 and 500 nanometers.