Frontiers of Characterization and Metrology for Nanoelectronics: Archived Publications and Talks

Frontiers of Characterization and Metrology for Nanoelectronics: 2013

Publication:

E.M. Secula and D.G. Seiler, Frontiers of Characterization and Metrology for Nanoelectronics: 2013, 350 p. (25 March 2013)

Talks and Posters:

Presentations from the 2013 International Conference on Frontiers of 
Characterization and Metrology for Nanoelectronics 

Archived Publications

Archived Talks

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Main AIP Conference Proceedings Selection Page

• D. G. Seiler, A. C. Diebold, R. McDonald, C. M. Garner, D. Herr, R. P. Khosla, E. M. Secula, Frontiers of Characterization and Metrology for Nanoelectronics: 2009, American Institute of Physics, Melville, NY, Vol. 1173, 398 pp. (30 September 2009)
• D. G. Seiler, A. C. Diebold, R. McDonald, C. M. Garner, D. Herr, R. P. Khosla, E. M. Secula, Frontiers of Characterization and Metrology for Nanoelectronics: 2007, American Institute of Physics, Melville, NY, Vol. 931, 603 pp. (30 September 2007)
• D. G. Seiler, A. C. Diebold, R. McDonald, C. Ayre, R. Khosla, S. Zollner, E. M. Secula, Characterization and Metrology for ULSI Technology: 2005, American Institute of Physics, Melville, NY, 11747-4502, Vol 788, 667 pp. (28 September 2005)
• D. G. Seiler, A. C. Diebold, T. J. Shaffner, R. McDonald, S. Zollner, R. P. Khosla, E. M. Secula, Characterization and Metrology for ULSI Technology: 2003, American Institute of Physics, Melville, NY, Vol 683, 812 pp. (30 September 2003)
• D. G. Seiler, A. C. Diebold, T. J. Shaffner, R. C. McDonald, W. M. Bullis, P. J. Smith, E. M. Secula, Characterization and Metrology for ULSI Technology: 2000, American Institute of Physics, Melville, NY, Vol 550, pp. 1-708 (1 February 2001)
• D. G. Seiler, A. C. Diebold, W. M. Bullis, T. J. Shaffner, R. C. McDonald, E. J. Walters, Characterization and Metrology for ULSI Technology, American Institute of Physics, Melville, NY, Vol 449 (1 November 1998)
• W. M. Bullis, D. G. Seiler, A. C. Diebold, Semiconductor Characterization: Present Status and Future Needs, American Institute of Physics, Woodbury, NY, 729 p. (1995) (Coming Soon!)

Archived Talks

• Presentations from the 2011 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics
• Presentations from 2009 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics
• Presentations from 2007 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics
• Presentations from 2005 International Conference on Characterization and Metrology for ULSI Technology 
• Presentations from 2003 International Conference on Characterization and Metrology for ULSI Technology
• Presentations from 2000 International Conference on Characterization and Metrology for ULSI Technology