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Frontiers of Characterization and Metrology for Nanoelectronics


The 2015 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (FCMN) will be held at the Hilton Dresden Downtown in Dresden, Germany, April 14-16, 2015!


Special Opportunity for Lab Tours:

Lab tours to Globalfoundries, Fraunhofer IPMS-CNT, Fraunhofer IKTS-MD and DCN Lab at TUD will be held on April 13th.

Meet the scientists who make the research at Globalfoundries, Fraunhofer IPMS-CNT, Fraunhofer IKTS-MD and DCN happen! These four labs offer the unique opportunity for you to hear about their fascinating research and see their scientific machines.

Tours will begin on April 13th at 15:30 PM in front of the entrance of the Hilton Hotel. Buses will transport you to the lab of your choice. The tour will end at approximately 17:30 PM. Buses will transport you back to the Hilton Hotel.

Be aware that only a group of 15 people (maximum) can attend to each lab tour, so register quickly!

Send a short registration email by 12:00 PM (Dresden time) on April 6th to Linda Kriusk and name the lab that you wish to attend.

The Conference:

While a city of notable art treasure, architectural sights, and a charming landscape, Dresden also has largest hub of microelectronics in Europe. Dresden is a center of materials science and engineering (more than 2000 materials scientists and engineers at TU Dresden and in several institutes).

The FCMN brings together scientists and engineers interested in all aspects of the characterization technology needed for nanoelectronic materials and device research, development, and manufacturing. All approaches are welcome: chemical, physical, electrical, magnetic, optical, in-situ, and real-time control and monitoring. The conference summarizes major issues and provides critical reviews of important semiconductor techniques needed as the semiconductor industry moves to silicon nanoelectronics and beyond.

The conference will consist of formal invited presentation sessions and poster sessions for contributed papers. The poster papers will cover new developments in characterization and metrology especially at the nanoscale.

The conference series began at NIST in 1995. There have been nine conferences in the series.

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Committee Co-Chairs:

  • David Seiler, NIST
  • Alain Diebold, College of Nanoscale Science and Engineering, SUNY Albany
  • Bob McDonald, formerly of Intel (Treasurer)
  • Zhiyong Ma, Intel
  • Ehrenfried Zschech, Fraunhofer Institute for Ceramic Technologies and Systems

Committee Members:

  • Amal Chabli, CEA-Leti
  • Luigi Colombo, TI
  • Michael Current, Current Scientific
  • Ajey Jacob, Global Foundries
  • Toshihiko Kanayama, AIST
  • Shifeng Lu, Micron
  • Ulrich Mantz, Zeiss
  • Lori S. Nye, Brewer Science, Inc.
  • Yaw Obeng, NIST
  • Lothar Pfitzner, Fraunhofer IISB
  • Sesh Ramaswami, Applied Materials
  • Erik Secula, NIST
  • George Thompson, Intel
  • Sandip Tiwari, Cornell University
  • Victor Vartanian, ISMI
  • Wilfried Vandervorst, IMEC
  • Usha Varshney, NSF


We have many outstanding invited speakers confirmed to speak at the conference, including Nobel Prize winner Klaus von Klitzing, Max-Planck-Institut FKF; Suresh Venkatesan, Senior Vice President, Technology Development, Global Foundries; and Hubert Lakner, Executive Director, Fraunhofer Institute for Photonic Microsystems! The full conference program is available on-line. Bios and pictures for many of our invited speakers are available on-line here.


"There were a total of 34 talks and 81 poster presentations that summarized major issues and provided critical reviews of crucial semiconductor developments and techniques needed as the industry evolves to silicon nanoelectronics and beyond."    

- Alex Braun, "A Jaunt Through Nanotechnopolis,"
Semiconductor International, May 20, 2009


"If you want to meet, greet, and learn from the world's experts in metrology, this is the place to be."    

- Dan Hutcheson, The Chip Insider,
January 11, 2007


Start Date: Tuesday, April 14, 2015
End Date: Thursday, April 16, 2015
Location: Hilton Dresden Downtown, Dresden, Germany
Audience: Industry, Government, Academia
Format: Conference


The fee is 520 €. Students may register for 190 €. One-day registration is available for 190 €. Please note, a 19% VAT (value added tax) will be added to your registration fee.

Register now!

Local Information:

Travel Details


Blocks of rooms are available at the Hilton Dresden Hotel starting at 144 €. Click here for reservations. This special room rate will be available until Mar. 2nd or until the group block is sold-out, whichever comes first.

Blocks are also available at the Steigenberger Hotel de Sax (starting at 149 €) and the Ibis Hotel Königstein (starting at 65 €). To make reservations, please click on the appropriate link below to download a reservation form, which should be filled out and faxed to the number indicated on the form.

Technical Contact: