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Frontiers of Characterization and Metrology for Nanoelectronics

Purpose:

The 2017 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (FCMN) will be held at the Monterey Marriott in Monterey, CA, Mar. 21-23, 2017.

Monterey

Monterey is a scenic California coastal city that rises from the pristine Monterey Bay to pine forested hillsides with sweeping bay views.

The Conference:

The FCMN will bring together scientists and engineers interested in all aspects of the characterization technology needed for nanoelectronic materials and device research, development, and manufacturing. All approaches are welcome: chemical, physical, electrical, magnetic, optical, in-situ, and real-time control and monitoring. The conference will summarize major issues and provided critical reviews of important semiconductor techniques needed as the semiconductor industry moves to silicon nanoelectronics and beyond.

The conference consists of formal invited presentation sessions and poster sessions for contributed papers. The poster papers cover new developments in characterization and metrology especially at the nanoscale.

The conference series began at NIST in 1995. This is the 11th conference in the series.

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Committee Members:
  • Amal Chabli, CEA-Leti
  • Luigi Colombo, Texas Instruments
  • Michael Current, Current Scientific
  • Alain Diebold, CNSE, SUNY Albany
  • Ajey Jacob, Globalfoundries
  • Scott List, Intel
  • Shifeng Lu, Micron
  • Zhiyong Ma, Intel
  • Ulrich Mantz, Zeiss
  • Bob McDonald, formerly of Intel (treasurer)
  • Lori Nye, formerly of Brewer Science
  • Yaw Obeng, NIST
  • Shinichi Ogawa, AIST
  • Lothar Pfitzner, Fraunhofer IISB
  • Erik Secula, NIST
  • David Seiler, NIST
  • Wilfried Vandervorst, Imec
  • Usha Varshney, NSF
  • Vic Vartanian, SEMATECH
  • Ehrenfried Zschech, Fraunhofer

Testimonials:


"There were a total of 34 talks and 81 poster presentations that summarized major issues and provided critical reviews of crucial semiconductor developments and techniques needed as the industry evolves to silicon nanoelectronics and beyond."    

- Alex Braun, "A Jaunt Through Nanotechnopolis,"
Semiconductor International, May 20, 2009

 

"If you want to meet, greet, and learn from the world's experts in metrology, this is the place to be."    

- Dan Hutcheson, The Chip Insider,
January 11, 2007

Details:

Start Date: Tuesday, March 21, 2017
End Date: Thursday, March 23, 2017
Location: Monterey Marriott, Monterey, CA
Audience: Industry, Government, Academia
Format: Conference

Sponsor(s):


2017 Sponsors

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Archives:

Publications and Talks from Past Conferences

General Information Contact:

Katie MacFarland

Publication Contact:

Erik Secula

Registration:

On-line advanced registration will be available soon!

Accommodations:

Blocks of rooms are available at the Monterey Marriott Hotel starting at $169.00 plus applicable state and local taxes. This special room rate will be available until Feb. 27, 2017, or until the group block is sold-out, whichever comes first. On-line reservations will be available soon.

Technical Contact: