The Dimensional Measurement Services Project within the Semiconductor & Dimensional Metrology Division (683) of the Physical Measurement Laboratory (PML) at the National Institute of Standards and Technology (NIST) realizes and disseminates the SI units of length, concentrates on dimensional measurements in the range of a few micrometers to one meter, and provides the delivery of those measurements, standards and infrastructural technology services that promote U.S. innovation and industrial competitiveness.
We also maintain and develop the advanced interferometric systems required to transfer the frequency-based realization of the SI length scale to physical artifacts. We perform research into advancing the state of the art of coordinate dimensional metrology and developing methods to quantify the performance evaluation of dimensional measurement instrumentation. We actively support international and national dimensional metrology standards committees by our participation and leadership and with emphasis on rigorous uncertainty evaluation.
The Dimensional Measurement Services project provides industry high accuracy dimensional measurements within an internationally accepted quality system. These measurements span the dimensional metrology needs over length scales ranging from micrometers to meters. Our measurements are targeted to provide measurement results that are either of very high value to our customers or high leverage into the industrial metrology community where a single calibration may propagate into hundreds or thousands of subsequent measurement results. This is accomplished by taking state-of-the-art equipment and optimizing the performance using superior environmental control, process development, and other metrology techniques. Rigorous focus on continuous improvement and flexibility of our measurement systems result in state of the art traditional measurement services and in many cases unique capability unmatched at the industrial or NMI level. Research efforts target industrial needs for smaller uncertainty, faster turnaround, and expanded measurement capabilities.
Selected Publications on Dimensional Metrology:
Figure 1. Measurement of API Rotary Master Gauge on CMM. © Robert Rathe
Lead Organizational Unit:pml
Related Programs and Projects:
Physical Measurement Laboratory (PML)