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Nanoscale Metrology Group


The Nanoscale Metrology Group in the Semiconductor & Dimensional Metrology Division of the Physical Measurement Laboratory (PML) at the National Institute of Standards and Technology (NIST), develops length measurement science and technology for advanced manufacturing nanotechnology and nanoscience, including time-resolved length. This measurement capability is critically needed, for example, by the semiconductor manufacturing industry for continued scaling and device integration, and for next-generation technology devices.  The Group disseminates the SI base unit of length down to the atomic scale, and the derived units of acceleration and acoustic pressure. Current focus areas include three-dimensional metrology of nanostructures including nanoparticles; micro- and nano-fluidic devices; and micro-electromechanical systems (MEMS).  The Group develops and applies displacement interferometry and advanced microscopy methods such as scanning electron, atomic force, helium ion, and optical.

Nanoscale Metrology

Acceleration, Vibration, and Acoustics—The Acceleration, Vibration, and Acoustics (AVA) Project advances the measurement science, develops standards, and provides calibration services for acceleration, vibration, and acoustic sensors …

Three-Dimensional Nanometer Metrology— We develop best-in-the-world 3D nanometer-scale dimensional measurement methods, reference artifacts and measurement protocols. To improve the accuracy and establish traceability, we develop, …

Micro- and Nanoelectromechanical Systems—Microelectromechanical systems (MEMS) are integrated devices with critical applications in sensing, timing, signal processing, and biomedical diagnostics, among others. They have become ubiquitous …


Physical Measurement Laboratory (PML)
Semiconductor & Dimensional Metrology Division

Nanoscale Metrology Group (683.03)
Dr. John A. Kramar, Leader

General Information:
Regenia M. McCloud, Secretary
301-975-3488 Telephone
301-869-0822 Facsimile

100 Bureau Drive, M/S 8212
Gaithersburg, Maryland 20899-8212