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Microelectromechanical systems (MEMS) are integrated devices with critical applications in sensing, timing, signal processing, and biomedical diagnostics, among others. They have become ubiquitous in a diverse set of markets including wireless communications, consumer products, automotive, aerospace, and medical devices. This project is focused on advancing measurement science for micro- and nanoelectromechanical systems (MEMS/NEMS) in order to increase device performance, functionality, and reliability. Our research ranges from fundamental studies of device physics to measurement methods used in manufacturing.
Increase the performance, functionality, and reliability of MEMS/NEMS through advances in measurement science, standards, and technology, which will promote innovation and competitiveness in the U.S. MEMS/NEMS industry and for its customers. This is achieved by:
MEMS/NEMS are enabling technologies that bring new functionalities with the potential to radically transform markets ranging from consumer products to national defense. The meteoric rise of the smartphone is an excellent example, in which MEMS accelerometers, gyroscopes, microphones, displays, and RF filters and oscillators provide functionality that has made the most sophisticated mobile phone from a decade ago look like a relic. The MEMS industry is expected to continue to grow quickly, particularly due to the establishment of the Internet of Things, which requires ubiquitous sensing, computing, and communications. This project is focused on innovations in measurement science that support the continued growth of the MEMS/NEMS industry, including new measurement techniques, the application of these techniques to fundamental problems in device physics and reliability, process and wafer-level manufacturing metrology, and standard test methods and reference materials. Due to the enormous diversity of devices found in this field, the research topics covered by the project are selected to match with growth areas identified by industry and to be the well-positioned within the NIST mission. Our current research is focused in the following areas:
Figure 1. An aluminum nanobeam that has been used to evaluate the performance limits of laser interferometry on nanostructures. Widths range from 100 nm to 600 nm.
Lead Organizational Unit:pml
Industry Groups: ITRS, iNEMI, MEMS Industry Group, SEMATECH
Related Programs and Projects:
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