Dr. Attota is a research engineer in the Nanoscale Metrology Group (683.03) in the Semiconductor & Dimensional Metrology Division (683) of the Physical Measurement Laboratory (PML) at the National Institute of Standards and Technology (NIST).
Dr. Attota is the TSOM project leader and his current research interest is in nanometrology using primarily optical methods. He is the developer of R&D 100 award winning TSOM optical method for dimensional analysis with potential applications in areas such as MEMS, NEMS, nanotechnology, the semiconductor industry, biotechnology, nanomanufacturing, nanometrology, the data storage industry, and photonics.
Dr. Attota is a recipient of an Alexander von Humboldt Fellowship from Germany (1996), a Silver Medal Award from Department of Commerce (2008) and an R&D 100 Award from R&D Magazine (2010). He has been at NIST since 1999. Prior to joining NIST he worked in Singapore and Germany. He received his Ph.D. from the Indian Institute of Science, Bangalore, India.
Dr. Attota has a presentation on Nanoscale Measurements with the TSOM Optical Method.
Semiconductor & Dimensional Metrology Division
Nanoscale Metrology Group