NIST logo
Bookmark and Share

CMOS and Novel Devices Group


The CMOS and Novel Devices Group develops measurement science to accelerate the commercialization and manufacture of high performance and reliable electron devices for the electronics industry by developing new characterization techniques, physics-based models, and data analysis methods. The Group develops the advanced metrology tools to enable quantitative and mechanistic assessment of reliability issues in emerging electronic devices. Another key thrust is to develop new measurements, physical models, and data analysis techniques to accelerate the development and commercialization of nanoelectronic device-based medical technology for life sciences and personalized health care.


Power Devices and Thermal Metrology—The Power Devices and Thermal Metrology Project develops electrical and thermal measurement methods and equipment to support development and application of advanced power semiconductor devices and …

CMOS Device and Reliability—The CMOS Device and Reliability Project develops advanced metrology tools to enable high performance CMOS (Complementary Metal Oxide Semiconductor) devices with sufficient reliability.These tools …

Metrology for Advanced Bioelectronics—We are developing electronic chip-based technology for DNA and protein analysis for industry. This research will help revolutionize health care, emergency rooms and personalized medicine. 

Back-End-of-Line Reliability Metrology Development—The Back-End-of-Line (BEOL) Reliability Metrology Development project aims to develop the metrology to enable quantitative and mechanistic assessment of performance limiting reliability issues in …

Photo of a high-speed, amplified probe.
High-speed, amplified probe tip used to collect reliability data in the NIST Advanced Device Characterization and Reliability laboratory.

Physical Measurement Laboratory (PML)
Semiconductor & Dimensional Metrology Division

CMOS and Novel Devices Group
Dr. John S. Suehle, Leader
301-975-2247 Telephone

General Information:
Christina Brapham, Secretary
301-975-2053 Telephone
301-975-8069 Facsimile

100 Bureau Drive, M/S 8120
Gaithersburg, Maryland 20899-8120