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HCl Lithography with 100 nm Edge Resolution

lithography on SAM

10 µm squares on SAM written with Xe44+
L. P. Ratliff, et al., Appl. Phys. Lett. 75, 590 (1999).

 lithography on PMMA

1 µm squares on PMMA written with Xe44+
J. D. Gillaspy, et al., J. Vac. Sci. Tech. B 16, 3294 (1998).

EBIT Ion-Surface Interactions