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Index of Semiconductor Process Gases - Boron Trichloride
|
BORON |
M.W. [1] 117.169 |
N.B.P [2] 285.65 K |
T.P [3] 166.15 K |
|
BCl3 |
Pc [4] 3.87 MPa |
Tc [4] 451.95 K |
Vc [5] 0.1483 m3/kmol |
Note: In the tables, # is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.
|
T K |
$$ \frac{C_P^0(T)} {R} $$ |
Vapor Pressure kPa |
B(T) cm3· |
dB/dT·T cm3· |
C(T) cm6· |
dC/dT·T cm6· |
λ mW/ |
η µPa·s |
|---|---|---|---|---|---|---|---|---|
|
Estimated |
1%/+0.1% |
1% |
Gas densities are calculated to better than 0.1% over the temperature and pressure ranges of the reference.
|
10% |
10% |
|||
|
Reference |
||||||||
|
290 |
+7.45 |
119 |
-780.9 |
1760.5 |
-138842 |
1531523 |
#7.4 |
#12.0 |
|
295 |
+7.49 |
141 |
-751.4 |
1685.1 |
-114510 |
1320367 |
#7.5 |
#12.2 |
|
300 |
+7.53 |
166 |
-723.7 |
1614.9 |
-93866 |
1140490 |
#7.7 |
#12.3 |
|
305 |
+7.57 |
195 |
-697.5 |
1549.6 |
-76314 |
986761 |
#7.8 |
#12.5 |
|
310 |
+7.62 |
227 |
-672.8 |
1488.6 |
-61365 |
854979 |
#7.9 |
#12.6 |
|
315 |
+7.66 |
263 |
-649.5 |
1431.6 |
-48611 |
741684 |
#8.1 |
#12.8 |
|
320 |
+7.70 |
303 |
-627.4 |
1378.2 |
-37717 |
644020 |
#8.2 |
#13.0 |
|
340 |
+7.85 |
508 |
-549.5 |
1195.3 |
-7749 |
367768 |
#8.8 |
#13.6 |
|
360 |
+7.99 |
799 |
-485.5 |
1050.6 |
8360 |
208501 |
#9.4 |
#14.2 |
|
380 |
+8.12 |
1195 |
-431.9 |
934.1 |
16889 |
114183 |
#9.9 |
#14.9 |
|
400 |
+8.25 |
1719 |
-386.5 |
838.6 |
21178 |
57261 |
#10.5 |
#15.5 |
|
420 |
+8.36 |
2397 |
-347.5 |
759.1 |
23062 |
22529 |
#11.0 |
#16.2 |
|
440 |
+8.46 |
3264 |
-313.8 |
692.2 |
23580 |
1292 |
#11.6 |
#16.8 |
|
450 |
+8.51 |
3781 |
-298.6 |
662.6 |
23524 |
-5958 |
#11.9 |
#17.1 |
|
460 |
+8.55 |
- |
-284.3 |
635.2 |
23329 |
-11574 |
#12.1 |
#17.4 |
|
480 |
*8.66 |
- |
-258.4 |
586.2 |
22661 |
-19171 |
#12.7 |
#18.1 |
|
500 |
*8.74 |
- |
-235.3 |
543.6 |
21784 |
-23414 |
#13.3 |
#18.7 |
|
550 |
*8.91 |
- |
-187.7 |
458.6 |
19357 |
-26247 |
#14.6 |
#20.3 |
|
600 |
*9.05 |
- |
-150.7 |
395.2 |
17136 |
-24375 |
#16.0 |
#21.9 |
|
650 |
*9.17 |
- |
-121.0 |
346.2 |
15307 |
-21206 |
#17.3 |
#23.4 |
|
700 |
*9.26 |
- |
-96.8 |
307.5 |
13856 |
-17943 |
#18.6 |
#25.0 |
|
750 |
*9.34 |
- |
-76.7 |
276.1 |
12722 |
-14986 |
#19.9 |
#26.5 |
|
800 |
*9.41 |
- |
-59.8 |
250.2 |
11838 |
-12436 |
#21.2 |
#28.0 |
|
850 |
*9.47 |
- |
-45.3 |
228.4 |
11151 |
-10284 |
#22.4 |
#29.5 |
|
900 |
*9.52 |
- |
-32.8 |
210.0 |
10615 |
-8485 |
#23.6 |
#30.9 |
|
950 |
*9.56 |
- |
-21.8 |
194.1 |
10198 |
-6987 |
#24.8 |
#32.3 |
|
1000 |
*9.60 |
- |
-12.3 |
180.3 |
9872 |
-5739 |
#26.0 |
#33.7 |
References:
- IUPAC, "Atomic Weights of the Elements 1993," J. Phys. Chem. Ref. Data (1995, 24, 1561).
- "Handbook of Chemistry and Physics," 62nd ed., the Chemical Rubber Co., Cleveland, OH (1981).
- "Predicted by Project Staff at The Pennsylvania State University using either published or internal methods.
- Lynn, Jr., R.E., and Kobe, K.A., "The Critical Properties of Elements and Compounds," Chem. Rev. (1953, 52, 117).
- Matheson Gas Data Book, unabridged ed., Matheson Company, Inc. East Rutherford, NJ (1974, 4 vols.)
- "JANAF Thermochemical Tables," J. Phys. Chem. Ref. Data (1978, 7, 793). 1978 Supplement
- Hurly, J.J., "Thermophysical Properties of Gaseous HBr and BCl3 from Speed-of-Sound Measurements," Int. J. Thermophys. (2000, 21/4).
- Stull, D.R., "Vapor Pressure of Pure Substances," Ind. Eng. Chem. (1947, 39, 517).
Footnote:
# is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.
Contacts
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