> Return to SRD 134, Index of Semiconductor Process Gases
|
CARBON
TETRAFLUORIDE
|
M.W. [1]
88.0046
|
N.B.P [2]
145.09 K
|
T.P [3]
89.56 K
|
|
CF4
|
Pc [2]
3.74 MPa
|
Tc [2]
227.5 K
|
Vc [2]
0.14066 m3/kmol
|
Note: In the tables, #RED is used for properties obtained from estimation methods. *,†Other colors are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.
|
T
K
|
|
Vapor Pressure
MPa
|
B(T)
cm3·mol-1
|
dB/dT·T
cm3·mol-1
|
C(T)
cm6·mol-2
|
dC/dT·T
cm6·mol-2
|
λ
mW/(m·K)
|
η
µPa·s
|
|
Estimated
Uncertainty
|
1%/0.1%
|
1%
|
Gas densitities are calculated to better than 0.1% over the temperature and pressure ranges of the reference.
|
5%
|
*5%/†0.5%
|
|
Reference
|
*4/†5
|
3
|
5
|
5
|
5
|
5
|
6
|
*7/†8
|
|
150
|
*4.81
|
0.14
|
-421.4
|
922.9
|
-24832
|
331231
|
4.9
|
*9.2
|
|
155
|
*4.90
|
0.19
|
-392.3
|
853.3
|
-15389
|
248458
|
5.2
|
*9.5
|
|
160
|
*4.98
|
0.26
|
-366.2
|
792.3
|
-8518
|
187002
|
5.5
|
*9.8
|
|
165
|
*5.07
|
0.34
|
-342.7
|
738.4
|
-3503
|
140922
|
5.8
|
*10.1
|
|
170
|
*5.16
|
0.44
|
-321.4
|
690.6
|
163
|
106070
|
6.1
|
*10.4
|
|
175
|
*5.25
|
0.56
|
-302.0
|
648.0
|
2837
|
79513
|
6.5
|
*10.7
|
|
180
|
*5.34
|
0.70
|
-284.3
|
609.7
|
4779
|
59144
|
6.8
|
*11.0
|
|
185
|
*5.43
|
0.86
|
-268.0
|
575.3
|
6176
|
43436
|
7.1
|
*11.3
|
|
190
|
*5.52
|
1.06
|
-253.1
|
544.2
|
7166
|
31270
|
7.5
|
*11.6
|
|
195
|
*5.61
|
1.28
|
-239.4
|
516.0
|
7851
|
21814
|
7.8
|
*11.9
|
|
200
|
*5.70
|
1.54
|
-226.6
|
490.3
|
8307
|
14448
|
8.2
|
*12.6
|
|
205
|
*5.79
|
1.84
|
-214.8
|
466.7
|
8590
|
8702
|
8.6
|
*12.9
|
|
210
|
*5.88
|
2.17
|
-203.8
|
445.2
|
8743
|
4221
|
8.9
|
†13.2
|
|
215
|
*5.97
|
2.56
|
-193.6
|
425.3
|
8800
|
730
|
9.3
|
†13.4
|
|
220
|
†6.06
|
2.99
|
-184.0
|
407.0
|
8785
|
-1980
|
9.7
|
†13.6
|
|
225
|
†6.15
|
3.48
|
-175.1
|
390.1
|
8716
|
-4073
|
10.0
|
†13.7
|
|
227
|
†6.18
|
3.70
|
-171.6
|
383.7
|
8676
|
-4767
|
10.2
|
†14.0
|
|
230
|
†6.23
|
-
|
-166.7
|
374.5
|
8608
|
-5677
|
10.4
|
†14.2
|
|
235
|
†6.32
|
-
|
-158.8
|
359.9
|
8472
|
-6892
|
10.8
|
†14.5
|
|
240
|
†6.41
|
-
|
-151.3
|
346.3
|
8317
|
-7798
|
11.2
|
†14.8
|
|
245
|
†6.49
|
-
|
-144.3
|
333.7
|
8149
|
-8456
|
11.6
|
†15.0
|
|
250
|
†6.58
|
-
|
-137.7
|
321.8
|
7973
|
-8916
|
12.0
|
†15.3
|
|
255
|
†6.66
|
-
|
-131.4
|
310.7
|
7793
|
-9219
|
12.4
|
†15.5
|
|
260
|
†6.74
|
-
|
-125.5
|
300.3
|
7612
|
-9397
|
12.8
|
†15.8
|
|
265
|
†6.82
|
-
|
-119.9
|
290.5
|
7433
|
-9474
|
13.2
|
†16.0
|
|
270
|
†6.91
|
-
|
-114.5
|
281.3
|
7255
|
-9473
|
13.6
|
†16.3
|
|
275
|
†6.99
|
-
|
-109.5
|
272.6
|
7082
|
-9408
|
14.0
|
†16.6
|
|
280
|
†7.06
|
-
|
-104.6
|
264.4
|
6914
|
-9294
|
14.4
|
†16.8
|
|
285
|
†7.14
|
-
|
-100.0
|
256.7
|
6750
|
-9142
|
14.8
|
†17.1
|
|
290
|
†7.22
|
-
|
-95.6
|
249.3
|
6593
|
-8961
|
15.2
|
†17.3
|
|
295
|
†7.30
|
-
|
-91.4
|
242.4
|
6441
|
-8757
|
15.6
|
†17.6
|
|
300
|
†7.37
|
-
|
-87.4
|
235.7
|
6296
|
-8537
|
16.0
|
†17.8
|
|
305
|
†7.45
|
-
|
-83.5
|
229.5
|
6157
|
-8306
|
16.4
|
†18.0
|
|
310
|
†7.52
|
-
|
-79.9
|
223.5
|
6024
|
-8066
|
16.8
|
†18.2
|
|
315
|
†7.59
|
-
|
-76.3
|
217.8
|
5897
|
-7822
|
17.2
|
†18.3
|
|
318.7
|
†7.65
|
-
|
-73.8
|
213.7
|
5806
|
-7640
|
17.5
|
†19.3
|
|
320
|
†7.67
|
-
|
-72.9
|
212.3
|
5775
|
-7576
|
17.6
|
†20.2
|
|
340
|
†7.95
|
-
|
-60.7
|
192.9
|
5345
|
-6604
|
19.3
|
†21.1
|
|
360
|
†8.21
|
-
|
-50.1
|
176.5
|
4994
|
-5700
|
20.9
|
*20.4
|
|
380
|
†8.47
|
-
|
-41.0
|
162.6
|
4708
|
-4891
|
22.6
|
*21.3
|
|
400
|
†8.71
|
-
|
-32.9
|
150.5
|
4475
|
-4181
|
24.3
|
*22.2
|
|
420
|
†8.93
|
-
|
-25.9
|
140.1
|
4287
|
-3566
|
25.9
|
*23.0
|
|
440
|
†9.14
|
-
|
-19.6
|
130.9
|
4133
|
-3034
|
27.6
|
*23.9
|
|
460
|
†9.34
|
-
|
-13.9
|
122.7
|
4009
|
-2576
|
29.2
|
*24.7
|
|
480
|
*9.54
|
-
|
-8.9
|
115.5
|
3908
|
-2181
|
30.8
|
*25.6
|
|
500
|
*9.72
|
-
|
-4.3
|
109.0
|
3826
|
-1842
|
32.4
|
*26.4
|
|
550
|
*10.11
|
-
|
5.5
|
95.4
|
3683
|
-1183
|
36.3
|
*28.3
|
|
600
|
*10.45
|
-
|
13.3
|
84.6
|
3601
|
-724
|
40.1
|
*30.2
|
|
650
|
*10.74
|
-
|
19.7
|
75.8
|
3557
|
-403
|
43.8
|
*32.1
|
|
700
|
*10.98
|
-
|
25.0
|
68.5
|
3535
|
-177
|
47.4
|
*33.8
|
|
750
|
*11.19
|
-
|
29.5
|
62.4
|
3529
|
-18
|
50.8
|
*35.5
|
|
800
|
*11.37
|
-
|
33.4
|
57.2
|
3532
|
93
|
54.2
|
*37.1
|
|
850
|
*11.53
|
-
|
36.7
|
52.7
|
3540
|
170
|
57.4
|
*38.7
|
|
900
|
*11.66
|
-
|
39.6
|
48.8
|
3551
|
222
|
60.5
|
*40.3
|
|
950
|
*11.78
|
-
|
42.2
|
45.3
|
3564
|
256
|
663.5
|
*41.8
|
|
1000
|
*11.88
|
-
|
44.4
|
42.3
|
3578
|
275
|
66.4
|
*43.3
|
References:
- IUPAC, "Atomic Weights of the Elements 1993," J. Phys. Chem. Ref. Data (1995, 24, 1561).
- "Selected Values of Properties of Chemical Compounds," Data Project; Thermodynamics Research Center, Texas A&M University, College Station, TX (1980).
- Stavely, L.A., "Lobo, L.Q., "Thermodynamic Properties of Liquid Carbon Tetrafluoride," J. Chem. Eng. Data, (1981, 26, 404).
- Chase, M., "JANAF Thermochemical Table, 3rd Edition," J. Phys. Chem. Ref. Data (198, 14) Supplement #1.
- Hurly, J.J., "Thermophysical Properties of Gaseous CF4 and C2F6 from Speed-of-Sound Measurements, Int. J. Thermophys. (1999, 20, 455).
- Uribe, F.J., Mason, E.A., Kestin, J., "Thermal Conductivity of Nine Polyatomic Gases at Low Density", J. Phys. Chem. Ref. Data (1990, 19, 1123).
- "Thermophysical Properties of Matter", IFI/Plenum, New York, (1970. 13 Vols.); J. M. Hellemans, "The Viscosity of CH4, CF4, and SF6 Over a Range of Temperatures", Physica (1973, 65, 376).
- Hurly, J.J., Gillis, K.A., Mehl, J.B., and Moldover, M.R., "The Viscosity of Seven Gases Measured with a Greenspan Viscometer," Int. J. Thermophys. (2003, Vol 24/6).
Footnote:
#RED is used for properties obtained from estimation methods.
*BLUE, †ORANGE Other colors are used to distinguish between differing data sets within a single column.
Contacts:
Keith Gillis
301-975-2468
keith.gillis@nist.gov
Michael Moldover
301-975-2459
michael.moldover@nist.gov
100 Bureau Drive, M/S 8360
Gaithersburg, MD 20899-8360
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