> Return to SRD 134, Index of Semiconductor Process Gases
|
HEXAFLUOROETHANE
|
M.W. [1]
138.012
|
N.B.P [2]
194.95 K
|
T.P [3]
173.1 K
|
|
C2F6
|
Pc [4]
2.98 MPa
|
Tc [5]
292.8 K
|
Vc [5]
0.22188 m3/kmol
|
Note: In the tables, #RED is used for properties obtained from estimation methods. *,†Other colors are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.
|
T
K
|
|
Vapor Pressure
kPa
|
B(T)
cm3·mol-1
|
dB/dT·T
cm3·mol-1
|
C(T)
cm6·mol-2
|
dC/dT·T
cm6·mol-2
|
λ
mW/(m·K)
|
η
µPa·s
|
|
Estimated
Uncertainty
|
*1%/†0.1%
|
1%
|
Gas densities are calculated to better than 0.1% over the temperature and pressure ranges of the reference.
|
#10%
|
#10%/
†0.5%
|
|
Reference
|
*6/†7
|
2,8,9
|
7
|
7
|
7
|
7
|
10
|
4,11/,12
|
|
170
|
*8.90
|
21.78
|
-954.2
|
2352.7
|
-392157
|
3843692
|
#-
|
#-
|
|
175
|
*9.08
|
30.77
|
-888.8
|
2164.3
|
-294095
|
2960987
|
#-
|
#8.7
|
|
180
|
*9.25
|
42.60
|
-830.1
|
1999.3
|
-220399
|
2299063
|
#-
|
#8.9
|
|
185
|
*9.43
|
57.87
|
-777.4
|
1854.0
|
-164559
|
1797381
|
#-
|
#9.2
|
|
190
|
*9.60
|
77.28
|
-729.7
|
1725.3
|
-121947
|
1413439
|
#-
|
#9.5
|
|
195
|
*9.76
|
101.59
|
-686.4
|
1610.9
|
-89229
|
1116994
|
#7.4
|
#9.7
|
|
200
|
*9.93
|
131.61
|
-646.9
|
1508.5
|
-63978
|
886255
|
#7.7
|
#10.0
|
|
205
|
*10.09
|
168.24
|
-610.8
|
1416.6
|
-44407
|
705336
|
#8.0
|
#10.2
|
|
210
|
*10.25
|
212.39
|
-577.7
|
1333.8
|
-29191
|
562532
|
#8.2
|
#10.5
|
|
215
|
*10.41
|
265.06
|
-547.2
|
1258.9
|
-17334
|
449129
|
#8.5
|
#10.8
|
|
220
|
*10.56
|
327.26
|
-519.0
|
1190.9
|
-8084
|
358581
|
#8.8
|
#11.0
|
|
225
|
*10.72
|
400.05
|
-493.0
|
1128.9
|
-869
|
285925
|
#9.1
|
†11.0
|
|
230
|
*10.87
|
484.51
|
-468.8
|
1072.3
|
4752
|
227370
|
#9.4
|
†11.2
|
|
235
|
*11.02
|
581.75
|
-446.3
|
1020.4
|
9116
|
179997
|
#9.7
|
†11.5
|
|
240
|
*11.17
|
692.88
|
-425.3
|
972.7
|
12488
|
141540
|
#10.0
|
†11.7
|
|
245
|
*11.32
|
819.02
|
-405.7
|
928.7
|
15074
|
110231
|
#10.3
|
†11.9
|
|
250
|
*11.46
|
961.29
|
-387.4
|
888.1
|
17035
|
84680
|
#10.6
|
†12.1
|
|
255
|
*11.61
|
1120.81
|
-370.2
|
850.5
|
18499
|
63791
|
#10.9
|
†12.4
|
|
260
|
*11.75
|
1298.69
|
-354.0
|
815.6
|
19567
|
46688
|
#11.2
|
†12.6
|
|
265
|
*11.89
|
1496.00
|
-338.8
|
783.2
|
20318
|
32676
|
#11.6
|
†12.8
|
|
270
|
*12.03
|
1713.84
|
-324.4
|
752.9
|
20819
|
21193
|
#11.9
|
†13.0
|
|
275
|
*12.17
|
1953.23
|
-310.9
|
724.7
|
21119
|
11787
|
#12.2
|
†13.2
|
|
280
|
*12.30
|
2215.22
|
-298.0
|
698.3
|
21260
|
4093
|
#12.5
|
†13.5
|
|
285
|
*12.44
|
2500.79
|
-285.9
|
673.6
|
21275
|
-2187
|
#12.8
|
†13.7
|
|
290
|
*12.57
|
2810.92
|
-274.4
|
650.4
|
21191
|
-7297
|
#13.2
|
†13.9
|
|
292.8
|
*12.64
|
2995.66
|
-268.2
|
638.0
|
21109
|
-9723
|
#13.4
|
†14.0
|
|
295
|
*12.70
|
-
|
-263.5
|
628.5
|
21030
|
-11436
|
#13.5
|
†14.1
|
|
300
|
†12.85
|
-
|
-253.1
|
608.0
|
20808
|
-14769
|
#13.8
|
†14.3
|
|
305
|
†12.97
|
-
|
-243.2
|
588.6
|
20541
|
-17430
|
#14.2
|
†14.5
|
|
310
|
†13.10
|
-
|
-233.8
|
570.3
|
20240
|
-19532
|
#14.5
|
†14.7
|
|
315
|
†13.23
|
-
|
-224.8
|
553.0
|
19914
|
-21168
|
#14.9
|
†14.9
|
|
320
|
†13.35
|
-
|
-216.2
|
536.7
|
19571
|
-22414
|
#15.2
|
†15.1
|
|
340
|
†13.83
|
-
|
-185.5
|
479.2
|
18126
|
-24650
|
#16.6
|
†15.9
|
|
360
|
†14.28
|
-
|
-159.4
|
432.0
|
16719
|
-24290
|
#18.1
|
†16.7
|
|
380
|
†14.71
|
-
|
-137.2
|
392.7
|
15444
|
-22736
|
#19.5
|
#18.5
|
|
400
|
†15.11
|
-
|
-117.9
|
359.4
|
14329
|
-20697
|
#21.0
|
#19.3
|
|
420
|
†15.48
|
-
|
-101.1
|
331.0
|
13371
|
-18536
|
#22.6
|
#20.1
|
|
440
|
†15.83
|
-
|
-86.2
|
306.5
|
12558
|
-16431
|
#24.2
|
#21.0
|
|
460
|
†16.16
|
-
|
-73.1
|
285.2
|
11871
|
-14465
|
#25.8
|
#21.8
|
|
480
|
*16.43
|
-
|
-61.4
|
266.4
|
11294
|
-12672
|
#27.4
|
#22.6
|
|
500
|
*16.71
|
-
|
-50.8
|
249.8
|
10810
|
-11060
|
#29.1
|
#23.3
|
|
550
|
*17.33
|
-
|
-28.7
|
215.7
|
9919
|
-7759
|
#33.5
|
#25.2
|
|
600
|
*17.85
|
-
|
-11.1
|
189.3
|
9354
|
-5324
|
#38.0
|
#27.0
|
|
650
|
*18.29
|
-
|
3.2
|
168.3
|
9002
|
-3533
|
#42.7
|
#28.7
|
|
700
|
*18.66
|
-
|
15.0
|
151.3
|
8791
|
-2212
|
#47.5
|
#30.4
|
|
750
|
*18.98
|
-
|
25.0
|
137.2
|
8673
|
-1233
|
#52.6
|
#32.0
|
|
800
|
*19.25
|
-
|
33.4
|
125.3
|
8618
|
-505
|
#57.8
|
#33.6
|
|
850
|
*19.48
|
-
|
40.7
|
115.1
|
8604
|
38
|
#63.1
|
#35.1
|
|
900
|
*19.67
|
-
|
47.0
|
106.4
|
8619
|
443
|
#68.6
|
#36.6
|
|
950
|
*19.85
|
-
|
52.6
|
98.7
|
8651
|
744
|
#74.2
|
#38.0
|
|
1000
|
*20.00
|
-
|
57.5
|
92.0
|
8695
|
966
|
#79.9
|
#39.4
|
References:
- IUPAC, "Atomic Weights of the Elements 1993," J. Phys. Chem. Ref. Data (1995, 24, 1561).
- "Selected Values of Properties of Chemical Compounds," Data Project; Thermodynamics Research Center, Texas A&M University, College Station, TX (1980).
- Westrum, Jr., E.F., Stull, D.R., and Sinke, G.C., "The Chemical Thermodynamics of ORganic Compounds," John Wiley and Sons, New York (1969).
- "Freon Products," E.I. DuPont de Nemours & Col., Inc., Freon Products Division, Wilmington, DE (1969).
- Zwolinski, B.J., Kudchadker, A.P., Alani, G.H., "The Critical Constants of Organic Substances," Chem. Rev. (1968, 68, 659).
- Chase, M., "JANAF Thermochemical Table, 3rd Edition," J. Phys. Chem. Ref. Data (198, 14) Supplement #1.
- Hurly, J.J., "Thermophysical Properties of Gaseous CF4 and C2F6 from Speed-of-Sound Measurements, Int. J. Thermophys. (1999, 20, 455).
- Ruff, O. and Keim, R., "Die Reaktions Produkte der Verschiedenen Kohlearten mit Fluor. I. Das Kohlenstoff-4-Fluorid (Tetrafluormethan)," Z. Anorg. Allg. Chem. (1930, 192, 249).
- Hala, E., Fried, V. and Boublik, T., "The Vapour Pressures of Pure Substances," Elsevier, New York (1973).
- Clifford, A.A., Dickinson, E., and Gray, P., "Thermal Conductivities of Gaseous Alkane + Perfluoralkane Mixtures," J. Chem. Soc. Faraday Trans. I (1976).
- Reichenberg, D., "The Viscosity of Organic Vapors at Low Pressures," DSC Rep. 11, National Physical Laboratory, Teddington, England (August 1971).
- Hurly, J.J., Gillis, K.A., Mehl, J.B., and Moldover, M.R., "The Viscosity of Seven Gases Measured with a Greenspan Viscometer," Int. J. Thermophys. (2003, Vol 24/6).
Footnote:
#RED is used for properties obtained from estimation methods.
*BLUE, †ORANGE Other colors are used to distinguish between differing data sets within a single column.
Contacts:
Keith Gillis
301-975-2468
keith.gillis@nist.gov
Michael Moldover
301-975-2459
michael.moldover@nist.gov
100 Bureau Drive, M/S 8360
Gaithersburg, MD 20899-8360
|
