> Return to SRD 134, Index of Semiconductor Process Gases
|
NITROGEN
|
M.W. [1]
28.0135
|
N.B.P [2]
77.344 K
|
T.P [2]
63.149 K
|
|
N2
|
Pc [2]
3.4 MPa
|
Tc [2]
126.2 K
|
Vc [3]
0.089413 m3/kmol
|
Note: In the tables, #RED is used for properties obtained from estimation methods. *,†Other colors are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.
|
T
K
|
|
Vapor Pressure
kPa
|
B(T)
cm3·mol-1
|
dB/dT·T
cm3·mol-1
|
C(T)
cm6·mol-2
|
dC/dT·T
cm6·mol-2
|
λ
mW/(m·K)
|
η
µPa·s
|
|
Estimated
Uncertainty
|
1%
|
1%
|
3%
|
-
|
5%
|
-
|
3%
|
3%
|
|
Reference
|
4
|
3/4
|
5
|
5
|
5
|
5
|
6/7
|
6-9
|
|
77
|
3.50
|
97.19
|
-267.6
|
524.2
|
-7811
|
102120
|
7.4
|
5.4
|
|
80
|
3.50
|
136.90
|
-248.3
|
482.6
|
-4451
|
74995
|
7.7
|
5.6
|
|
85
|
3.50
|
228.82
|
-220.9
|
425.0
|
-877
|
45186
|
8.2
|
5.9
|
|
90
|
3.50
|
360.29
|
-197.9
|
378.6
|
1154
|
27157
|
8.7
|
6.3
|
|
95
|
3.50
|
540.22
|
-178.5
|
340.6
|
2299
|
15969
|
9.2
|
6.6
|
|
100
|
3.50
|
777.99
|
-161.9
|
309.0
|
2925
|
8892
|
9.7
|
7.0
|
|
110
|
3.50
|
1467.16
|
-134.9
|
259.7
|
3371
|
1425
|
10.6
|
7.6
|
|
120
|
3.50
|
2515.42
|
-113.9
|
223.2
|
3342
|
-1681
|
11.5
|
8.3
|
|
130
|
3.50
|
-
|
-97.2
|
195.2
|
3151
|
-2900
|
12.4
|
8.9
|
|
140
|
3.50
|
-
|
-83.6
|
173.0
|
2919
|
-3272
|
13.3
|
9.5
|
|
150
|
3.50
|
-
|
-72.3
|
155.2
|
2692
|
-3259
|
14.1
|
10.1
|
|
160
|
3.50
|
-
|
-62.7
|
140.5
|
2487
|
-3077
|
14.9
|
10.7
|
|
170
|
3.50
|
-
|
-54.6
|
128.2
|
2308
|
-2829
|
15.8
|
11.3
|
|
180
|
3.50
|
-
|
-47.6
|
117.8
|
2154
|
-2565
|
16.6
|
11.8
|
|
190
|
3.50
|
-
|
-41.4
|
108.8
|
2022
|
-2309
|
17.4
|
12.4
|
|
200
|
3.50
|
-
|
-36.1
|
101.1
|
1910
|
-2071
|
18.2
|
12.9
|
|
210
|
3.50
|
-
|
-31.3
|
94.3
|
1814
|
-1855
|
19.0
|
13.4
|
|
220
|
3.50
|
-
|
-27.0
|
88.3
|
1732
|
-1661
|
19.7
|
14.0
|
|
230
|
3.50
|
-
|
-23.2
|
83.0
|
1662
|
-1490
|
20.5
|
14.5
|
|
240
|
3.50
|
-
|
-19.8
|
78.2
|
1602
|
-1337
|
21.2
|
15.0
|
|
250
|
3.50
|
-
|
-16.7
|
74.0
|
1550
|
-1203
|
22.0
|
15.5
|
|
260
|
3.50
|
-
|
-13.9
|
70.1
|
1505
|
-1084
|
22.7
|
15.9
|
|
270
|
3.50
|
-
|
-11.3
|
66.6
|
1466
|
-979
|
23.5
|
16.4
|
|
280
|
3.50
|
-
|
-8.9
|
63.4
|
1433
|
-886
|
24.2
|
16.9
|
|
290
|
3.50
|
-
|
-6.8
|
60.4
|
1403
|
-804
|
24.9
|
17.3
|
|
300
|
3.50
|
-
|
-4.8
|
57.7
|
1377
|
-731
|
25.6
|
17.8
|
|
310
|
3.50
|
-
|
-2.9
|
55.2
|
1354
|
-666
|
26.3
|
18.2
|
|
320
|
3.50
|
-
|
-1.2
|
52.9
|
1334
|
-609
|
27.0
|
18.7
|
|
330
|
3.51
|
-
|
0.4
|
50.8
|
1316
|
-557
|
27.7
|
19.1
|
|
340
|
3.51
|
-
|
1.9
|
48.8
|
1300
|
-512
|
28.4
|
19.6
|
|
350
|
3.51
|
-
|
3.3
|
46.9
|
1286
|
-471
|
29.1
|
20.0
|
|
360
|
3.51
|
-
|
4.6
|
45.2
|
1273
|
-435
|
29.8
|
20.4
|
|
370
|
3.51
|
-
|
5.8
|
43.6
|
1262
|
-402
|
30.5
|
20.8
|
|
380
|
3.51
|
-
|
6.9
|
42.1
|
1251
|
-373
|
31.1
|
21.2
|
|
390
|
3.52
|
-
|
8.0
|
40.6
|
1242
|
-347
|
31.8
|
21.7
|
|
400
|
3.52
|
-
|
9.0
|
39.3
|
1233
|
-324
|
32.5
|
22.1
|
|
410
|
3.52
|
-
|
10.0
|
38.0
|
1226
|
-303
|
33.1
|
22.5
|
|
420
|
3.52
|
-
|
10.9
|
36.8
|
1219
|
-284
|
33.8
|
22.8
|
|
430
|
3.53
|
-
|
11.7
|
35.6
|
1212
|
-267
|
34.4
|
23.2
|
|
440
|
3.53
|
-
|
12.5
|
34.5
|
1206
|
-252
|
35.1
|
23.6
|
|
450
|
3.53
|
-
|
13.3
|
33.5
|
1201
|
-238
|
35.7
|
24.0
|
|
460
|
3.54
|
-
|
14.0
|
32.5
|
1195
|
-226
|
36.4
|
24.4
|
|
470
|
3.54
|
-
|
14.7
|
31.6
|
1191
|
-215
|
37.0
|
24.8
|
|
480
|
3.55
|
-
|
15.4
|
30.7
|
1186
|
-205
|
37.6
|
25.1
|
|
490
|
3.55
|
-
|
16.0
|
29.8
|
1182
|
-196
|
38.3
|
25.5
|
|
500
|
3.56
|
-
|
16.6
|
29.0
|
1178
|
-188
|
38.9
|
25.9
|
|
550
|
3.59
|
-
|
19.2
|
25.5
|
1162
|
-159
|
42.0
|
27.7
|
|
600
|
3.62
|
-
|
21.3
|
22.5
|
1149
|
-144
|
45.0
|
29.4
|
|
650
|
3.66
|
-
|
23.0
|
20.1
|
1138
|
-136
|
48.0
|
31.1
|
|
700
|
3.70
|
-
|
24.4
|
18.0
|
1128
|
-133
|
50.9
|
32.7
|
|
750
|
3.74
|
-
|
25.6
|
16.2
|
1118
|
-134
|
53.8
|
34.2
|
|
800
|
3.78
|
-
|
26.6
|
14.7
|
1110
|
-137
|
56.6
|
35.8
|
|
850
|
3.82
|
-
|
27.4
|
13.4
|
1101
|
-141
|
59.4
|
37.3
|
|
900
|
3.86
|
-
|
28.1
|
12.2
|
1093
|
-146
|
62.2
|
38.7
|
|
950
|
3.90
|
-
|
28.8
|
11.1
|
1085
|
-151
|
64.9
|
40.1
|
|
1000
|
3.93
|
-
|
29.3
|
10.2
|
1077
|
-156
|
67.6
|
41.5
|
References:
- IUPAC; "Atomic Weights of the Elements 1993"; J. Phys. Chem. Ref. Data (24, 1561, 1995).
- "Standard Tables of Physical Constants of Paraffin Hydrocarbons and Other Components of Natural Gas", Publication No. 2145-84; Gas Processors Association, Tulsa, Oklahoma (1984).
- "IUPAC; International Thermodynamic Tables of the Fluid State-Nitrogen", Pergammon Press, Oxford (1979).
- "TRC Thermodynamic Tables-Hydrocarbons", Thermodynamics Research Center, The Texas A&M University System, College Station, TX (1985).
- Estela-Uribe, J.F. and Trusler, J.P.M., "Acoustic and Volumetric Virial Coefficients of Nitrogen", Inter. J. Thermophys., In Press.
- Hanley, H.J.M. and Ely, J.F., "The Viscosity and Thermal Conductivity Coefficients of Dilute Nitrogen and Oxygen", J. Phys. Chem. Ref. Data (2, 735, 1973).
- McCarty, R.D., Haynes, W.M., and Hanley, H.J.M., "The Viscosity and Thermal Conductivity Coefficients for Dense Gaseous and Liquid Argon, Krypton, Xenon, Nitrogen, and Oxygen", J. Phys. Chem. Ref. Data (3, 979, 1974).
- Wakeham, W. A., Cole, W.A., "The Viscosity of Nitrogen, Oxygen and their Binary Mixtures in the Limit of Zero Density", J. Phys. Chem. Ref. Data (14, 209, 1985).
- Younglove, B.A., "Thermophysical Properties of Fluids.1. Argon, Ethylene, Parahydrogen, Nitrogen, Nitrogen trifluoride, and Oxygen", J. Phys. Chem. Ref. Data (11. Suppl. No. 1., 1982).
Footnote:
#RED is used for properties obtained from estimation methods.
*BLUE, †ORANGE Other colors are used to distinguish between differing data sets within a single column.
Contacts:
Keith Gillis
301-975-2468
keith.gillis@nist.gov
Michael Moldover
301-975-2459
michael.moldover@nist.gov
100 Bureau Drive, M/S 8360
Gaithersburg, MD 20899-8360
|
