> Return to SRD 134, Index of Semiconductor Process Gases
|
SULFUR
DIOXIDE
|
M.W. [1]
64.066
|
N.B.P [1]
256.61 K
|
T.P [1]
197.7 K
|
|
SO2
|
Pc [1]
7.88 MPa
|
Tc [1]
430.65 K
|
Vc [1]
0.122026 m3/kmol
|
Note: In the tables, #RED is used for properties obtained from estimation methods. *,†Other colors are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.
|
T
K
|
|
Vapor Pressure
kPa
|
B(T)
cm3·mol-1
|
dB/dT·T
cm3·mol-1
|
C(T)
cm6·mol-2
|
dC/dT·T
cm6·mol-2
|
λ
mW/(m·K)
|
η
µPa·s
|
|
Estimated
Uncertainty
|
-
|
-
|
-
|
-
|
-
|
-
|
-
|
-
|
|
Reference
|
-
|
-
|
1
|
1
|
1
|
1
|
1
|
1
|
|
280
|
4.71
|
-
|
-518.30
|
1628.1
|
1020.5
|
-
|
10.44
|
12.08
|
|
290
|
4.75
|
-
|
-464.80
|
1426.2
|
2620.2
|
-
|
10.93
|
12.52
|
|
300
|
4.80
|
-
|
-419.37
|
1258.1
|
5286.0
|
-
|
11.42
|
12.97
|
|
310
|
4.85
|
-
|
-380.48
|
1117.2
|
7215.3
|
-
|
11.91
|
13.41
|
|
320
|
4.89
|
-
|
-346.94
|
998.2
|
8586.1
|
-
|
12.42
|
13.85
|
|
330
|
4.94
|
-
|
-317.81
|
897.1
|
9532.5
|
-
|
12.92
|
14.29
|
|
340
|
4.98
|
-
|
-292.35
|
81.05
|
10156.0
|
-
|
13.43
|
14.73
|
|
350
|
5.02
|
-
|
-269.96
|
735.9
|
10534.0
|
-
|
13.94
|
15.17
|
|
360
|
5.06
|
-
|
-250.15
|
671.3
|
10724.0
|
-
|
14.45
|
15.61
|
|
370
|
5.11
|
-
|
-232.54
|
615.0
|
10774.0
|
-
|
14.97
|
16.04
|
|
380
|
5.15
|
-
|
-216.81
|
565.7
|
10716.0
|
-
|
15.49
|
16.47
|
|
390
|
5.19
|
-
|
-202.69
|
522.2
|
10580.0
|
-
|
16.01
|
16.90
|
|
400
|
5.23
|
-
|
-189.97
|
483.7
|
10384.0
|
-
|
16.53
|
17.33
|
|
410
|
5.27
|
-
|
-178.45
|
449.4
|
10146.0
|
-
|
17.06
|
17.75
|
|
420
|
5.31
|
-
|
-168.00
|
418.8
|
9877.8
|
-
|
17.58
|
18.18
|
|
430
|
5.34
|
-
|
-158.47
|
391.3
|
9589.3
|
-
|
18.11
|
18.60
|
|
440
|
5.38
|
-
|
-149.77
|
366.5
|
9288.2
|
-
|
18.63
|
19.01
|
|
450
|
5.42
|
-
|
-141.79
|
344.0
|
8980.1
|
-
|
19.16
|
19.43
|
|
460
|
5.45
|
-
|
-134.45
|
323.6
|
8669.5
|
-
|
19.69
|
19.84
|
|
470
|
5.49
|
-
|
-127.69
|
305.0
|
8360.0
|
-
|
20.21
|
20.24
|
|
480
|
5.52
|
-
|
-121.45
|
288.0
|
8053.9
|
-
|
20.74
|
20.65
|
|
490
|
5.56
|
-
|
-115.68
|
272.3
|
7753.4
|
-
|
21.26
|
21.05
|
|
500
|
5.59
|
-
|
-110.33
|
257.9
|
7459.8
|
-
|
21.79
|
21.45
|
|
550
|
5.74
|
-
|
-88.62
|
200.3
|
6121.5
|
-
|
24.39
|
23.40
|
|
600
|
5.88
|
-
|
-73.05
|
159.1
|
5015.3
|
-
|
26.95
|
25.28
|
|
650
|
6.01
|
-
|
-61.59
|
128.3
|
4120.6
|
-
|
29.46
|
27.09
|
|
700
|
6.11
|
-
|
-52.98
|
104.5
|
3400.9
|
-
|
31.90
|
28.85
|
|
750
|
6.21
|
-
|
-46.44
|
85.6
|
2821.4
|
-
|
34.27
|
30.55
|
|
800
|
-
|
-
|
-
|
-
|
-
|
-
|
-
|
-
|
|
850
|
-
|
-
|
-
|
-
|
-
|
-
|
-
|
-
|
|
900
|
-
|
-
|
-
|
-
|
-
|
-
|
-
|
-
|
|
950
|
-
|
-
|
-
|
-
|
-
|
-
|
-
|
-
|
|
1000
|
-
|
-
|
-
|
-
|
-
|
-
|
-
|
-
|
References:
- Lemmon, E.W. and McLinden, M.O., NIST Standard Reference Database 23: NIST Reference Fluid Thermodynamic and Transport Properties, Version 7.0 Beta, National Institute of Standards and Technology, Standard Reference Data Program, Gaithersburg, 2001.
Footnote:
#RED is used for properties obtained from estimation methods.
*BLUE, †ORANGE Other colors are used to distinguish between differing data sets within a single column.
Contacts:
Keith Gillis
301-975-2468
keith.gillis@nist.gov
Michael Moldover
301-975-2459
michael.moldover@nist.gov
100 Bureau Drive, M/S 8360
Gaithersburg, MD 20899-8360
