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Charlie Tarrio

Charlie Tarrio received a BS from Bates College in Lewiston, ME, with high honors in physics. He received his PhD in physics from the University of Virginia in Charlottesville under the guidance of Steve Schnatterly. He used electron energy-loss spectroscopy to study electronic and optical properties of a diverse set of materials including superconductors and rare-gas solids. He has been at NIST since 1991. His primary interest is in properties of materials under illumination by vacuum ultraviolet radiation. These include optical constants, mirror reflectivities, susceptibility to environmental contamination, and radiation damage. He's developed several new tools and techniques on the Synchrotron Ultraviolet Radiation Facility. Current tools are described in the links below.

Research Interests:

  • Metrology for EUV Lithography
  • EUV mirror characterization
  • EUV optical properties
  • Photoresist outgassing
  • EUV components lifetime testing

Awards:

  • Department of Commerce Silver Medal, 2013
  • William P. Slichter Award, 2007
  • Department of Commerce Silver Medal, 2004
  • Arthur S. Flemming Award in Applied Science, 2003
  • Department of Commerce Bronze Medal, 1994
Charles Tarrio

Position:

Physicist
Sensor Science Division
Ultraviolet Radiation Group

Employment History:

1991-present, NIST, Gaithersburg, MD

Education:

Ph.D. Physics, University of Virginia, Charlottesville, VA

B.S. Physics, Bates College, Lewiston, Maine

Contact

Phone: 301-975-3737
Email: charles.tarrio@nist.gov